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- W1966180009 abstract "Interfacial roughness in multilayer films may be random or correlated, i.e., replicated from layer to layer. It is shown that these can be separated and quantified using x-ray diffraction rocking curves and a straightforward analysis. The lateral correlation length along the interfaces can additionally be determined. A quantitative evaluation for W/C multilayers shows that correlated roughness contributes significantly to the total roughness, even at length scales that are surprisingly short, of the order 2–6 nm." @default.
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- W1966180009 date "1991-02-01" @default.
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- W1966180009 title "Determination of roughness correlations in multilayer films for x-ray mirrors" @default.
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- W1966180009 doi "https://doi.org/10.1063/1.347281" @default.
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