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• W1966199854 endingPage "2797" @default.
• W1966199854 startingPage "2794" @default.
• W1966199854 abstract "A new class of water soluble conducting polyanilines has been developed. This is accomplished by oxidatively polymerizing aniline monomers on a template such as a polymeric acid. The resulting polyanilines readily dissolve in water. These materials can be applied as removable discharge layers for electron-beam lithography and for mask inspection by scanning electron microscopy. They can be spin-applied directly on top of resists without any interfacial problems. Image distortion as a result of charging during resist exposure is not observed with these materials. After exposure the polyaniline is readily and cleanly removed during the resist develop. By incorporating cross-linkable functionality on the polyaniline backbone, water soluble polyanilines that are radiation curable are attained. Upon irradiation these materials cross-link and become insoluble and thus can be utilized as permanent conducting coatings for electrostatic discharge applications. In addition, the cross-linkable polyanilines can be used as water developable conducting resists. 1.0 μm conducting lines have been patterned with electron-beam irradiation." @default.
• W1966199854 created "2016-06-24" @default.
• W1966199854 creator A5014270946 @default.
• W1966199854 creator A5015658110 @default.
• W1966199854 creator A5022984117 @default.
• W1966199854 creator A5046116135 @default.
• W1966199854 creator A5048552765 @default.
• W1966199854 date "1993-11-01" @default.
• W1966199854 modified "2023-10-09" @default.
• W1966199854 title "Water soluble conducting polyanilines: Applications in lithography" @default.
• W1966199854 doi "https://doi.org/10.1116/1.586604" @default.
• W1966199854 hasPublicationYear "1993" @default.
• W1966199854 type Work @default.
• W1966199854 sameAs 1966199854 @default.
• W1966199854 citedByCount "71" @default.
• W1966199854 countsByYear W19661998542012 @default.
• W1966199854 countsByYear W19661998542013 @default.
• W1966199854 countsByYear W19661998542014 @default.
• W1966199854 countsByYear W19661998542015 @default.
• W1966199854 countsByYear W19661998542017 @default.
• W1966199854 countsByYear W19661998542018 @default.
• W1966199854 countsByYear W19661998542022 @default.
• W1966199854 crossrefType "journal-article" @default.
• W1966199854 hasAuthorship W1966199854A5014270946 @default.
• W1966199854 hasAuthorship W1966199854A5015658110 @default.
• W1966199854 hasAuthorship W1966199854A5022984117 @default.
• W1966199854 hasAuthorship W1966199854A5046116135 @default.
• W1966199854 hasAuthorship W1966199854A5048552765 @default.
• W1966199854 hasConcept C105163801 @default.
• W1966199854 hasConcept C105487726 @default.
• W1966199854 hasConcept C111337013 @default.
• W1966199854 hasConcept C121332964 @default.
• W1966199854 hasConcept C127413603 @default.
• W1966199854 hasConcept C147120987 @default.
• W1966199854 hasConcept C159985019 @default.
• W1966199854 hasConcept C166940927 @default.
• W1966199854 hasConcept C171250308 @default.
• W1966199854 hasConcept C178790620 @default.
• W1966199854 hasConcept C185544564 @default.
• W1966199854 hasConcept C185592680 @default.
• W1966199854 hasConcept C188027245 @default.
• W1966199854 hasConcept C192562407 @default.
• W1966199854 hasConcept C200274948 @default.
• W1966199854 hasConcept C204223013 @default.
• W1966199854 hasConcept C26771246 @default.
• W1966199854 hasConcept C2777580120 @default.
• W1966199854 hasConcept C2779227376 @default.
• W1966199854 hasConcept C2779244968 @default.
• W1966199854 hasConcept C42360764 @default.
• W1966199854 hasConcept C44228677 @default.
• W1966199854 hasConcept C49040817 @default.
• W1966199854 hasConcept C521977710 @default.
• W1966199854 hasConcept C53524968 @default.
• W1966199854 hasConcept C62520636 @default.
• W1966199854 hasConcept C95312477 @default.
• W1966199854 hasConceptScore W1966199854C105163801 @default.
• W1966199854 hasConceptScore W1966199854C105487726 @default.
• W1966199854 hasConceptScore W1966199854C111337013 @default.
• W1966199854 hasConceptScore W1966199854C121332964 @default.
• W1966199854 hasConceptScore W1966199854C127413603 @default.
• W1966199854 hasConceptScore W1966199854C147120987 @default.
• W1966199854 hasConceptScore W1966199854C159985019 @default.
• W1966199854 hasConceptScore W1966199854C166940927 @default.
• W1966199854 hasConceptScore W1966199854C171250308 @default.
• W1966199854 hasConceptScore W1966199854C178790620 @default.
• W1966199854 hasConceptScore W1966199854C185544564 @default.
• W1966199854 hasConceptScore W1966199854C185592680 @default.
• W1966199854 hasConceptScore W1966199854C188027245 @default.
• W1966199854 hasConceptScore W1966199854C192562407 @default.
• W1966199854 hasConceptScore W1966199854C200274948 @default.
• W1966199854 hasConceptScore W1966199854C204223013 @default.
• W1966199854 hasConceptScore W1966199854C26771246 @default.
• W1966199854 hasConceptScore W1966199854C2777580120 @default.
• W1966199854 hasConceptScore W1966199854C2779227376 @default.
• W1966199854 hasConceptScore W1966199854C2779244968 @default.
• W1966199854 hasConceptScore W1966199854C42360764 @default.
• W1966199854 hasConceptScore W1966199854C44228677 @default.
• W1966199854 hasConceptScore W1966199854C49040817 @default.
• W1966199854 hasConceptScore W1966199854C521977710 @default.
• W1966199854 hasConceptScore W1966199854C53524968 @default.
• W1966199854 hasConceptScore W1966199854C62520636 @default.
• W1966199854 hasConceptScore W1966199854C95312477 @default.
• W1966199854 hasIssue "6" @default.
• W1966199854 hasLocation W19661998541 @default.
• W1966199854 hasOpenAccess W1966199854 @default.
• W1966199854 hasPrimaryLocation W19661998541 @default.
• W1966199854 hasRelatedWork W1983850620 @default.
• W1966199854 hasRelatedWork W1998155172 @default.
• W1966199854 hasRelatedWork W2007100303 @default.
• W1966199854 hasRelatedWork W2035787511 @default.
• W1966199854 hasRelatedWork W2046133330 @default.
• W1966199854 hasRelatedWork W2067009955 @default.
• W1966199854 hasRelatedWork W2091794199 @default.
• W1966199854 hasRelatedWork W2147570722 @default.
• W1966199854 hasRelatedWork W2381078339 @default.
• W1966199854 hasRelatedWork W4234615702 @default.
• W1966199854 hasVolume "11" @default.
• W1966199854 isParatext "false" @default.

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