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- W1966240503 abstract "The (buried) interface between a polycrystalline Al thin-film feature and its substrate (single crystal Si) was characterized with x-ray microdiffraction. Using a focused x-ray beam (effective spot size on the specimen ∼2×12 μm) with the Si 004 reflection, topographic images of the Si around and under the metallization feature were constructed. Comparison with shear-lag model calculations indicate that the interface is not fully coupled despite the absence of surface cracks." @default.
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- W1966240503 date "1998-06-22" @default.
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- W1966240503 title "Characterization of substrate/thin-film interfaces with x-ray microdiffraction" @default.
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- W1966240503 doi "https://doi.org/10.1063/1.121596" @default.
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