FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966266922> ?p ?o ?g. }

• W1966266922 abstract "Today, copper is the best material for TSV (through silicon via) filling because it can fill a large structural volume and it has good electrical performance. Nevertheless, copper-filled TSVs experience many reliability problems, the most serious of which are the stress-induced issues that can be large enough to cause interfacial fracture or delamination of complex interfaces. Many studies have been conducted to characterize the residual stress around TSV using direct experimental measurement, finite element simulation, and microstructural analysis. The experimental approach is very useful in its speed and direct compatibility with the process, but they have their own limitations to adapt to every case. Nanoinstrumented indentation testing, on the other hand, has many advantages: easy sample preparation and simple algorithms lead to a simple characterization of the micropartial stress between samples with the load difference at the same indentation depth. Here we introduce an algorithm to measure the micropartial residual stress in the copper area (the TSV itself) using conventional NIT (nanoinstrumented indentation testing). We used in-situ SEM (scanning electron microscope) indentation to characterize more accurately the keep-out zone in the silicon area (around TSV), even in very minute areas. Our study is useful in reliability-based quantitative design by defining keep-out zones below several micrometers between TSVs and other transistor-level devices." @default.
• W1966266922 created "2016-06-24" @default.
• W1966266922 creator A5016410582 @default.
• W1966266922 creator A5044995953 @default.
• W1966266922 creator A5072124738 @default.
• W1966266922 creator A5089675928 @default.
• W1966266922 date "2012-01-01" @default.
• W1966266922 modified "2023-09-23" @default.
• W1966266922 title "Mechanical characterization of residual stress around TSV through instrumented indentation algorithm" @default.
• W1966266922 cites W2021127111 @default.
• W1966266922 cites W2022454657 @default.
• W1966266922 cites W2045102846 @default.
• W1966266922 cites W2052137108 @default.
• W1966266922 cites W2055939331 @default.
• W1966266922 cites W2068150347 @default.
• W1966266922 cites W2086933933 @default.
• W1966266922 cites W2089894096 @default.
• W1966266922 cites W2097325446 @default.
• W1966266922 cites W2098473989 @default.
• W1966266922 cites W2112022641 @default.
• W1966266922 cites W2118017426 @default.
• W1966266922 cites W2118294059 @default.
• W1966266922 cites W2130880491 @default.
• W1966266922 cites W2136056669 @default.
• W1966266922 cites W2137920146 @default.
• W1966266922 cites W2150620980 @default.
• W1966266922 cites W2154133941 @default.
• W1966266922 doi "https://doi.org/10.1109/3dic.2012.6262996" @default.
• W1966266922 hasPublicationYear "2012" @default.
• W1966266922 type Work @default.
• W1966266922 sameAs 1966266922 @default.
• W1966266922 citedByCount "7" @default.
• W1966266922 countsByYear W19662669222012 @default.
• W1966266922 countsByYear W19662669222015 @default.
• W1966266922 countsByYear W19662669222019 @default.
• W1966266922 countsByYear W19662669222022 @default.
• W1966266922 crossrefType "proceedings-article" @default.
• W1966266922 hasAuthorship W1966266922A5016410582 @default.
• W1966266922 hasAuthorship W1966266922A5044995953 @default.
• W1966266922 hasAuthorship W1966266922A5072124738 @default.
• W1966266922 hasAuthorship W1966266922A5089675928 @default.
• W1966266922 hasConcept C121332964 @default.
• W1966266922 hasConcept C123745756 @default.
• W1966266922 hasConcept C127413603 @default.
• W1966266922 hasConcept C135628077 @default.
• W1966266922 hasConcept C138885662 @default.
• W1966266922 hasConcept C151730666 @default.
• W1966266922 hasConcept C159985019 @default.
• W1966266922 hasConcept C163258240 @default.
• W1966266922 hasConcept C171250308 @default.
• W1966266922 hasConcept C192562407 @default.
• W1966266922 hasConcept C21036866 @default.
• W1966266922 hasConcept C2780841128 @default.
• W1966266922 hasConcept C2780902562 @default.
• W1966266922 hasConcept C30239060 @default.
• W1966266922 hasConcept C31258907 @default.
• W1966266922 hasConcept C37292000 @default.
• W1966266922 hasConcept C41008148 @default.
• W1966266922 hasConcept C41895202 @default.
• W1966266922 hasConcept C43214815 @default.
• W1966266922 hasConcept C45632049 @default.
• W1966266922 hasConcept C49040817 @default.
• W1966266922 hasConcept C544956773 @default.
• W1966266922 hasConcept C58097730 @default.
• W1966266922 hasConcept C62520636 @default.
• W1966266922 hasConcept C66938386 @default.
• W1966266922 hasConcept C77928131 @default.
• W1966266922 hasConcept C86803240 @default.
• W1966266922 hasConceptScore W1966266922C121332964 @default.
• W1966266922 hasConceptScore W1966266922C123745756 @default.
• W1966266922 hasConceptScore W1966266922C127413603 @default.
• W1966266922 hasConceptScore W1966266922C135628077 @default.
• W1966266922 hasConceptScore W1966266922C138885662 @default.
• W1966266922 hasConceptScore W1966266922C151730666 @default.
• W1966266922 hasConceptScore W1966266922C159985019 @default.
• W1966266922 hasConceptScore W1966266922C163258240 @default.
• W1966266922 hasConceptScore W1966266922C171250308 @default.
• W1966266922 hasConceptScore W1966266922C192562407 @default.
• W1966266922 hasConceptScore W1966266922C21036866 @default.
• W1966266922 hasConceptScore W1966266922C2780841128 @default.
• W1966266922 hasConceptScore W1966266922C2780902562 @default.
• W1966266922 hasConceptScore W1966266922C30239060 @default.
• W1966266922 hasConceptScore W1966266922C31258907 @default.
• W1966266922 hasConceptScore W1966266922C37292000 @default.
• W1966266922 hasConceptScore W1966266922C41008148 @default.
• W1966266922 hasConceptScore W1966266922C41895202 @default.
• W1966266922 hasConceptScore W1966266922C43214815 @default.
• W1966266922 hasConceptScore W1966266922C45632049 @default.
• W1966266922 hasConceptScore W1966266922C49040817 @default.
• W1966266922 hasConceptScore W1966266922C544956773 @default.
• W1966266922 hasConceptScore W1966266922C58097730 @default.
• W1966266922 hasConceptScore W1966266922C62520636 @default.
• W1966266922 hasConceptScore W1966266922C66938386 @default.
• W1966266922 hasConceptScore W1966266922C77928131 @default.
• W1966266922 hasConceptScore W1966266922C86803240 @default.
• W1966266922 hasLocation W19662669221 @default.
• W1966266922 hasOpenAccess W1966266922 @default.
• W1966266922 hasPrimaryLocation W19662669221 @default.
• W1966266922 hasRelatedWork W2004362670 @default.
• W1966266922 hasRelatedWork W2019002696 @default.

• next