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- W1966279459 endingPage "1673" @default.
- W1966279459 startingPage "1669" @default.
- W1966279459 abstract "He-implantation and annealing is an alternative method of fabricating strain-relaxed SiGe buffer layers for applications such as strained Si MOSFETs. Here we report the characteristics of He-implanted and annealed SiGe buffer layers and the properties of n-channel MOSFETs fabricated with them. We find that the electron mobility is comparable to the value obtained from devices fabricated with graded SiGe buffer layers. The drive current is 1.8 times larger than that in bulk Si control devices and short channel MOSFETs have a low current at negative gate voltage." @default.
- W1966279459 created "2016-06-24" @default.
- W1966279459 creator A5012576587 @default.
- W1966279459 creator A5027269106 @default.
- W1966279459 creator A5031137751 @default.
- W1966279459 creator A5039155812 @default.
- W1966279459 creator A5040262927 @default.
- W1966279459 creator A5043481373 @default.
- W1966279459 creator A5055791192 @default.
- W1966279459 creator A5073806223 @default.
- W1966279459 creator A5076988586 @default.
- W1966279459 creator A5031836590 @default.
- W1966279459 date "2005-10-01" @default.
- W1966279459 modified "2023-10-01" @default.
- W1966279459 title "N-channel MOSFETs fabricated on He-implanted and annealed SiGe buffer layers" @default.
- W1966279459 cites W2028503100 @default.
- W1966279459 cites W2096907937 @default.
- W1966279459 cites W2098643581 @default.
- W1966279459 cites W2105023546 @default.
- W1966279459 cites W2118842063 @default.
- W1966279459 cites W2124340473 @default.
- W1966279459 cites W2137900832 @default.
- W1966279459 doi "https://doi.org/10.1016/j.sse.2005.07.024" @default.
- W1966279459 hasPublicationYear "2005" @default.
- W1966279459 type Work @default.
- W1966279459 sameAs 1966279459 @default.
- W1966279459 citedByCount "11" @default.
- W1966279459 countsByYear W19662794592012 @default.
- W1966279459 countsByYear W19662794592013 @default.
- W1966279459 countsByYear W19662794592023 @default.
- W1966279459 crossrefType "journal-article" @default.
- W1966279459 hasAuthorship W1966279459A5012576587 @default.
- W1966279459 hasAuthorship W1966279459A5027269106 @default.
- W1966279459 hasAuthorship W1966279459A5031137751 @default.
- W1966279459 hasAuthorship W1966279459A5031836590 @default.
- W1966279459 hasAuthorship W1966279459A5039155812 @default.
- W1966279459 hasAuthorship W1966279459A5040262927 @default.
- W1966279459 hasAuthorship W1966279459A5043481373 @default.
- W1966279459 hasAuthorship W1966279459A5055791192 @default.
- W1966279459 hasAuthorship W1966279459A5073806223 @default.
- W1966279459 hasAuthorship W1966279459A5076988586 @default.
- W1966279459 hasConcept C106782819 @default.
- W1966279459 hasConcept C119599485 @default.
- W1966279459 hasConcept C127413603 @default.
- W1966279459 hasConcept C145018004 @default.
- W1966279459 hasConcept C159985019 @default.
- W1966279459 hasConcept C165801399 @default.
- W1966279459 hasConcept C172385210 @default.
- W1966279459 hasConcept C192562407 @default.
- W1966279459 hasConcept C2777855556 @default.
- W1966279459 hasConcept C2778413303 @default.
- W1966279459 hasConcept C49040817 @default.
- W1966279459 hasConceptScore W1966279459C106782819 @default.
- W1966279459 hasConceptScore W1966279459C119599485 @default.
- W1966279459 hasConceptScore W1966279459C127413603 @default.
- W1966279459 hasConceptScore W1966279459C145018004 @default.
- W1966279459 hasConceptScore W1966279459C159985019 @default.
- W1966279459 hasConceptScore W1966279459C165801399 @default.
- W1966279459 hasConceptScore W1966279459C172385210 @default.
- W1966279459 hasConceptScore W1966279459C192562407 @default.
- W1966279459 hasConceptScore W1966279459C2777855556 @default.
- W1966279459 hasConceptScore W1966279459C2778413303 @default.
- W1966279459 hasConceptScore W1966279459C49040817 @default.
- W1966279459 hasIssue "10" @default.
- W1966279459 hasLocation W19662794591 @default.
- W1966279459 hasOpenAccess W1966279459 @default.
- W1966279459 hasPrimaryLocation W19662794591 @default.
- W1966279459 hasRelatedWork W1530261449 @default.
- W1966279459 hasRelatedWork W1981365698 @default.
- W1966279459 hasRelatedWork W1991805416 @default.
- W1966279459 hasRelatedWork W2058570774 @default.
- W1966279459 hasRelatedWork W2073808883 @default.
- W1966279459 hasRelatedWork W2078819817 @default.
- W1966279459 hasRelatedWork W2161192040 @default.
- W1966279459 hasRelatedWork W2540042124 @default.
- W1966279459 hasRelatedWork W2983479992 @default.
- W1966279459 hasRelatedWork W4328139950 @default.
- W1966279459 hasVolume "49" @default.
- W1966279459 isParatext "false" @default.
- W1966279459 isRetracted "false" @default.
- W1966279459 magId "1966279459" @default.
- W1966279459 workType "article" @default.