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- W1966291779 abstract "Tantalum nitride (TaN x ) films are deposited on silicon substrates by radio frequency (rf) reactive sputtering of Ta in N 2 /Ar gas mixtures. The deposition rate, chemical composition, and crystalline microstructure are investigated by cross-sectional transmission electron microscopy, X-ray photoelectron spectroscopy, Auger electron spectroscopy, X-ray diffraction, and atomic force microscopy, respectively. According to those results, the deposition rate, film composition, and microstructure correlate with the bias. A stepwise change in deposition rate is observed at a N 2 /Ar flow ratio of 0.2 for all biases. The deposition rate increases with the bias throughout the whole range of N 2 /Ar flow ratio. Crystalline TaN can be deposited on Si substrates at a N 2 /Ar flow ratio of 0.25 and all biases. The TaN lattice is distorted due to the change of N concentration. In addition, the experimental data which were interpreted using the deposition mechanism and the kinetic model which were published previously." @default.
- W1966291779 created "2016-06-24" @default.
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- W1966291779 date "2000-01-01" @default.
- W1966291779 modified "2023-09-24" @default.
- W1966291779 title "Growth of Tantalum Nitride Films on Si by Radio Frequency Reactive Sputtering of Ta in N[sub 2]/Ar Gas Mixtures: Effect of Bias" @default.
- W1966291779 doi "https://doi.org/10.1149/1.1393257" @default.
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