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- W1966374619 endingPage "3192" @default.
- W1966374619 startingPage "3188" @default.
- W1966374619 abstract "We demonstrate and evaluate proximity effect correction using blur map at a compromised focal plane in electron projection lithography. Critical dimension (CD) accuracy was improved from 12to5nm for 100nm L∕S pattern with 34% pattern area density by using blur maps calculated by space charge effect correction (SCEC) program, which is provided with the electron beam stepper NSR-EB1A by Nikon. CD error due to the SCEC was estimated to be 4nm, corresponding to 6nm in terms of blur for the resist process; this is substantiated by comparing the calculated and measured blurs that ranged from 6.3to−4.3nm." @default.
- W1966374619 created "2016-06-24" @default.
- W1966374619 creator A5027316187 @default.
- W1966374619 creator A5043944850 @default.
- W1966374619 creator A5050010393 @default.
- W1966374619 creator A5063160074 @default.
- W1966374619 date "2005-11-01" @default.
- W1966374619 modified "2023-09-25" @default.
- W1966374619 title "Proximity effect correction using blur map in electron projection lithography" @default.
- W1966374619 cites W1980432042 @default.
- W1966374619 cites W1981352299 @default.
- W1966374619 cites W2004986884 @default.
- W1966374619 cites W2038325984 @default.
- W1966374619 cites W2051227446 @default.
- W1966374619 cites W2054216334 @default.
- W1966374619 cites W2109245734 @default.
- W1966374619 doi "https://doi.org/10.1116/1.2101791" @default.
- W1966374619 hasPublicationYear "2005" @default.
- W1966374619 type Work @default.
- W1966374619 sameAs 1966374619 @default.
- W1966374619 citedByCount "3" @default.
- W1966374619 countsByYear W19663746192012 @default.
- W1966374619 countsByYear W19663746192015 @default.
- W1966374619 countsByYear W19663746192023 @default.
- W1966374619 crossrefType "journal-article" @default.
- W1966374619 hasAuthorship W1966374619A5027316187 @default.
- W1966374619 hasAuthorship W1966374619A5043944850 @default.
- W1966374619 hasAuthorship W1966374619A5050010393 @default.
- W1966374619 hasAuthorship W1966374619A5063160074 @default.
- W1966374619 hasConcept C11413529 @default.
- W1966374619 hasConcept C120665830 @default.
- W1966374619 hasConcept C121332964 @default.
- W1966374619 hasConcept C146617872 @default.
- W1966374619 hasConcept C160671074 @default.
- W1966374619 hasConcept C171250308 @default.
- W1966374619 hasConcept C187504802 @default.
- W1966374619 hasConcept C192562407 @default.
- W1966374619 hasConcept C200274948 @default.
- W1966374619 hasConcept C202444582 @default.
- W1966374619 hasConcept C204223013 @default.
- W1966374619 hasConcept C207789793 @default.
- W1966374619 hasConcept C2779227376 @default.
- W1966374619 hasConcept C33676613 @default.
- W1966374619 hasConcept C33923547 @default.
- W1966374619 hasConcept C49040817 @default.
- W1966374619 hasConcept C53524968 @default.
- W1966374619 hasConcept C57493831 @default.
- W1966374619 hasConceptScore W1966374619C11413529 @default.
- W1966374619 hasConceptScore W1966374619C120665830 @default.
- W1966374619 hasConceptScore W1966374619C121332964 @default.
- W1966374619 hasConceptScore W1966374619C146617872 @default.
- W1966374619 hasConceptScore W1966374619C160671074 @default.
- W1966374619 hasConceptScore W1966374619C171250308 @default.
- W1966374619 hasConceptScore W1966374619C187504802 @default.
- W1966374619 hasConceptScore W1966374619C192562407 @default.
- W1966374619 hasConceptScore W1966374619C200274948 @default.
- W1966374619 hasConceptScore W1966374619C202444582 @default.
- W1966374619 hasConceptScore W1966374619C204223013 @default.
- W1966374619 hasConceptScore W1966374619C207789793 @default.
- W1966374619 hasConceptScore W1966374619C2779227376 @default.
- W1966374619 hasConceptScore W1966374619C33676613 @default.
- W1966374619 hasConceptScore W1966374619C33923547 @default.
- W1966374619 hasConceptScore W1966374619C49040817 @default.
- W1966374619 hasConceptScore W1966374619C53524968 @default.
- W1966374619 hasConceptScore W1966374619C57493831 @default.
- W1966374619 hasIssue "6" @default.
- W1966374619 hasLocation W19663746191 @default.
- W1966374619 hasOpenAccess W1966374619 @default.
- W1966374619 hasPrimaryLocation W19663746191 @default.
- W1966374619 hasRelatedWork W1996082410 @default.
- W1966374619 hasRelatedWork W2030781314 @default.
- W1966374619 hasRelatedWork W2061514188 @default.
- W1966374619 hasRelatedWork W2071629416 @default.
- W1966374619 hasRelatedWork W2073728321 @default.
- W1966374619 hasRelatedWork W2088103355 @default.
- W1966374619 hasRelatedWork W2099827585 @default.
- W1966374619 hasRelatedWork W2118954929 @default.
- W1966374619 hasRelatedWork W4307818291 @default.
- W1966374619 hasRelatedWork W4321641452 @default.
- W1966374619 hasVolume "23" @default.
- W1966374619 isParatext "false" @default.
- W1966374619 isRetracted "false" @default.
- W1966374619 magId "1966374619" @default.
- W1966374619 workType "article" @default.