Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966442488> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1966442488 endingPage "457" @default.
- W1966442488 startingPage "457" @default.
- W1966442488 abstract "SiNxHy films have been deposited using an SiH4-N2 mixture in a capacitively coupled remote plasma-enhanced chemical vapour deposition (RPECVD) system, where conditions favour transport of active species and energy to the deposition zone. In contrast to an inductively coupled RPECVD system, He dilution produces little influence on growth rate. Such a dilution does, however, strongly influence the film composition. Helium atoms promote the formation of atomic nitrogen in the gas phase and assist in delivering additional energy to the surface of the growing film; this leads to changes in the relative amounts of Si–Hi and N–Hj bonds and in the Si/N ratio of the deposited films. With the addition of helium, films of composition close to that of stoichiometric silicon nitride can be produced." @default.
- W1966442488 created "2016-06-24" @default.
- W1966442488 creator A5006307624 @default.
- W1966442488 creator A5007051637 @default.
- W1966442488 creator A5050291128 @default.
- W1966442488 date "1995-01-01" @default.
- W1966442488 modified "2023-10-16" @default.
- W1966442488 title "Remote plasma-enhanced chemical vapour deposition of silicon nitride films: the effect of diluting nitrogen with helium" @default.
- W1966442488 cites W2023019533 @default.
- W1966442488 cites W2060824718 @default.
- W1966442488 cites W2078921161 @default.
- W1966442488 cites W2083976024 @default.
- W1966442488 cites W2316522517 @default.
- W1966442488 doi "https://doi.org/10.1039/jm9950500457" @default.
- W1966442488 hasPublicationYear "1995" @default.
- W1966442488 type Work @default.
- W1966442488 sameAs 1966442488 @default.
- W1966442488 citedByCount "8" @default.
- W1966442488 countsByYear W19664424882015 @default.
- W1966442488 countsByYear W19664424882016 @default.
- W1966442488 countsByYear W19664424882017 @default.
- W1966442488 crossrefType "journal-article" @default.
- W1966442488 hasAuthorship W1966442488A5006307624 @default.
- W1966442488 hasAuthorship W1966442488A5007051637 @default.
- W1966442488 hasAuthorship W1966442488A5050291128 @default.
- W1966442488 hasConcept C107872376 @default.
- W1966442488 hasConcept C113196181 @default.
- W1966442488 hasConcept C121332964 @default.
- W1966442488 hasConcept C144082473 @default.
- W1966442488 hasConcept C147789679 @default.
- W1966442488 hasConcept C151730666 @default.
- W1966442488 hasConcept C171250308 @default.
- W1966442488 hasConcept C178790620 @default.
- W1966442488 hasConcept C185592680 @default.
- W1966442488 hasConcept C192562407 @default.
- W1966442488 hasConcept C194760766 @default.
- W1966442488 hasConcept C2777431650 @default.
- W1966442488 hasConcept C2779227376 @default.
- W1966442488 hasConcept C2816523 @default.
- W1966442488 hasConcept C49040817 @default.
- W1966442488 hasConcept C537208039 @default.
- W1966442488 hasConcept C544956773 @default.
- W1966442488 hasConcept C546029482 @default.
- W1966442488 hasConcept C57410435 @default.
- W1966442488 hasConcept C62520636 @default.
- W1966442488 hasConcept C64297162 @default.
- W1966442488 hasConcept C82706917 @default.
- W1966442488 hasConcept C86803240 @default.
- W1966442488 hasConcept C95974651 @default.
- W1966442488 hasConcept C96618451 @default.
- W1966442488 hasConcept C97355855 @default.
- W1966442488 hasConceptScore W1966442488C107872376 @default.
- W1966442488 hasConceptScore W1966442488C113196181 @default.
- W1966442488 hasConceptScore W1966442488C121332964 @default.
- W1966442488 hasConceptScore W1966442488C144082473 @default.
- W1966442488 hasConceptScore W1966442488C147789679 @default.
- W1966442488 hasConceptScore W1966442488C151730666 @default.
- W1966442488 hasConceptScore W1966442488C171250308 @default.
- W1966442488 hasConceptScore W1966442488C178790620 @default.
- W1966442488 hasConceptScore W1966442488C185592680 @default.
- W1966442488 hasConceptScore W1966442488C192562407 @default.
- W1966442488 hasConceptScore W1966442488C194760766 @default.
- W1966442488 hasConceptScore W1966442488C2777431650 @default.
- W1966442488 hasConceptScore W1966442488C2779227376 @default.
- W1966442488 hasConceptScore W1966442488C2816523 @default.
- W1966442488 hasConceptScore W1966442488C49040817 @default.
- W1966442488 hasConceptScore W1966442488C537208039 @default.
- W1966442488 hasConceptScore W1966442488C544956773 @default.
- W1966442488 hasConceptScore W1966442488C546029482 @default.
- W1966442488 hasConceptScore W1966442488C57410435 @default.
- W1966442488 hasConceptScore W1966442488C62520636 @default.
- W1966442488 hasConceptScore W1966442488C64297162 @default.
- W1966442488 hasConceptScore W1966442488C82706917 @default.
- W1966442488 hasConceptScore W1966442488C86803240 @default.
- W1966442488 hasConceptScore W1966442488C95974651 @default.
- W1966442488 hasConceptScore W1966442488C96618451 @default.
- W1966442488 hasConceptScore W1966442488C97355855 @default.
- W1966442488 hasIssue "3" @default.
- W1966442488 hasLocation W19664424881 @default.
- W1966442488 hasOpenAccess W1966442488 @default.
- W1966442488 hasPrimaryLocation W19664424881 @default.
- W1966442488 hasRelatedWork W1977851291 @default.
- W1966442488 hasRelatedWork W2002070225 @default.
- W1966442488 hasRelatedWork W2004004508 @default.
- W1966442488 hasRelatedWork W2066021902 @default.
- W1966442488 hasRelatedWork W2074148262 @default.
- W1966442488 hasRelatedWork W2591945551 @default.
- W1966442488 hasRelatedWork W2614240128 @default.
- W1966442488 hasRelatedWork W2900373691 @default.
- W1966442488 hasRelatedWork W2944208507 @default.
- W1966442488 hasRelatedWork W4225347794 @default.
- W1966442488 hasVolume "5" @default.
- W1966442488 isParatext "false" @default.
- W1966442488 isRetracted "false" @default.
- W1966442488 magId "1966442488" @default.
- W1966442488 workType "article" @default.