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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966515418> ?p ?o ?g. }

• W1966515418 endingPage "1450" @default.
• W1966515418 startingPage "1441" @default.
• W1966515418 abstract "This paper investigates the fatigue behavior of n <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>+</sup> -type 2-mum- thick polycrystalline silicon films that exhibit an initially thin (~2-3 nm) native oxide layer. The testing of kilohertz-frequency resonators provided accurate stress-life fatigue data at 30 and 50% relative humidity (RH) in the low (< 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>6</sup> )and high (up to 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>11</sup> ) cycle regimes. Long fatigue life specimens were associated with larger decreases in the natural frequency of the resonator and very smooth failure origins (at the notch) that encompassed several grains. Additional testing at various humidity levels highlighted the critical influence of humidity on the fatigue damage accumulation rate, which was measured via changes in the natural frequency. Finally, Auger electron spectroscopy (AES) characterized the formation of a nanometer-scale oxygen-rich reaction layer during cyclic loading. Although AES revealed a thin 2-3-nm initial oxide layer on a control specimen, measurements on a long-life fatigued specimen revealed an increased oxygen concentration over the first 10 nm of the material at the notch root. These findings demonstrate that the reaction-layer fatigue mechanism for silicon structural films operates even when reaction layers are initially very thin." @default.
• W1966515418 created "2016-06-24" @default.
• W1966515418 creator A5054625448 @default.
• W1966515418 creator A5074429129 @default.
• W1966515418 date "2007-12-01" @default.
• W1966515418 modified "2023-10-15" @default.
• W1966515418 title "Notch Root Oxide Formation During Fatigue of Polycrystalline Silicon Structural Films" @default.
• W1966515418 cites W1546625087 @default.
• W1966515418 cites W1968105573 @default.
• W1966515418 cites W1974687098 @default.
• W1966515418 cites W1994147797 @default.
• W1966515418 cites W2002845214 @default.
• W1966515418 cites W2010387256 @default.
• W1966515418 cites W2012094877 @default.
• W1966515418 cites W2046149009 @default.
• W1966515418 cites W2058534696 @default.
• W1966515418 cites W2067556160 @default.
• W1966515418 cites W2069155847 @default.
• W1966515418 cites W2089336921 @default.
• W1966515418 cites W2091174835 @default.
• W1966515418 cites W2096692266 @default.
• W1966515418 cites W2103445414 @default.
• W1966515418 cites W2105980146 @default.
• W1966515418 cites W2126698220 @default.
• W1966515418 cites W2128785084 @default.
• W1966515418 cites W2162811918 @default.
• W1966515418 cites W2170038799 @default.
• W1966515418 doi "https://doi.org/10.1109/jmems.2007.906076" @default.
• W1966515418 hasPublicationYear "2007" @default.
• W1966515418 type Work @default.
• W1966515418 sameAs 1966515418 @default.
• W1966515418 citedByCount "16" @default.
• W1966515418 countsByYear W19665154182012 @default.
• W1966515418 countsByYear W19665154182014 @default.
• W1966515418 countsByYear W19665154182015 @default.
• W1966515418 countsByYear W19665154182016 @default.
• W1966515418 countsByYear W19665154182017 @default.
• W1966515418 countsByYear W19665154182023 @default.
• W1966515418 crossrefType "journal-article" @default.
• W1966515418 hasAuthorship W1966515418A5054625448 @default.
• W1966515418 hasAuthorship W1966515418A5074429129 @default.
• W1966515418 hasConcept C113196181 @default.
• W1966515418 hasConcept C121332964 @default.
• W1966515418 hasConcept C137637335 @default.
• W1966515418 hasConcept C159985019 @default.
• W1966515418 hasConcept C178790620 @default.
• W1966515418 hasConcept C185544564 @default.
• W1966515418 hasConcept C185592680 @default.
• W1966515418 hasConcept C191897082 @default.
• W1966515418 hasConcept C192562407 @default.
• W1966515418 hasConcept C25442681 @default.
• W1966515418 hasConcept C2779227376 @default.
• W1966515418 hasConcept C2779851234 @default.
• W1966515418 hasConcept C2780565262 @default.
• W1966515418 hasConcept C49040817 @default.
• W1966515418 hasConcept C544956773 @default.
• W1966515418 hasConcept C87359718 @default.
• W1966515418 hasConceptScore W1966515418C113196181 @default.
• W1966515418 hasConceptScore W1966515418C121332964 @default.
• W1966515418 hasConceptScore W1966515418C137637335 @default.
• W1966515418 hasConceptScore W1966515418C159985019 @default.
• W1966515418 hasConceptScore W1966515418C178790620 @default.
• W1966515418 hasConceptScore W1966515418C185544564 @default.
• W1966515418 hasConceptScore W1966515418C185592680 @default.
• W1966515418 hasConceptScore W1966515418C191897082 @default.
• W1966515418 hasConceptScore W1966515418C192562407 @default.
• W1966515418 hasConceptScore W1966515418C25442681 @default.
• W1966515418 hasConceptScore W1966515418C2779227376 @default.
• W1966515418 hasConceptScore W1966515418C2779851234 @default.
• W1966515418 hasConceptScore W1966515418C2780565262 @default.
• W1966515418 hasConceptScore W1966515418C49040817 @default.
• W1966515418 hasConceptScore W1966515418C544956773 @default.
• W1966515418 hasConceptScore W1966515418C87359718 @default.
• W1966515418 hasIssue "6" @default.
• W1966515418 hasLocation W19665154181 @default.
• W1966515418 hasOpenAccess W1966515418 @default.
• W1966515418 hasPrimaryLocation W19665154181 @default.
• W1966515418 hasRelatedWork W1970838757 @default.
• W1966515418 hasRelatedWork W1976191581 @default.
• W1966515418 hasRelatedWork W1993098890 @default.
• W1966515418 hasRelatedWork W2003387566 @default.
• W1966515418 hasRelatedWork W2049757704 @default.
• W1966515418 hasRelatedWork W2070141875 @default.
• W1966515418 hasRelatedWork W2326185588 @default.
• W1966515418 hasRelatedWork W2355862987 @default.
• W1966515418 hasRelatedWork W2402697569 @default.
• W1966515418 hasRelatedWork W321451418 @default.
• W1966515418 hasVolume "16" @default.
• W1966515418 isParatext "false" @default.
• W1966515418 isRetracted "false" @default.
• W1966515418 magId "1966515418" @default.
• W1966515418 workType "article" @default.