Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966530008> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W1966530008 abstract "An E-D tree based analysis of experimental X-ray lithography data is presented for features characteristic of CMOS logic gate levels. Pattern-specific print biases for isolated lines (150- 250 nm) and two types of nested lines (250 nm) are characterized. Depths of gap for increasing exposure latitudes at +/- 20 nm line width control are calculated for individual features. common process window analysis is performed on the nested and isolated 250-nm patterns. The impact of reducing the nominal mask to wafer gap (35-26 micrometers ) on maximum exposure latitude is evaluated and the effect of gap reduction and overexposure on the nested to isolated print bias is examined." @default.
- W1966530008 created "2016-06-24" @default.
- W1966530008 creator A5004664195 @default.
- W1966530008 creator A5006276271 @default.
- W1966530008 creator A5008624862 @default.
- W1966530008 creator A5045047044 @default.
- W1966530008 creator A5073775409 @default.
- W1966530008 creator A5085904418 @default.
- W1966530008 date "1995-05-19" @default.
- W1966530008 modified "2023-09-23" @default.
- W1966530008 title "Experimental x-ray process latitude evaluation using E-D tree analysis" @default.
- W1966530008 doi "https://doi.org/10.1117/12.209150" @default.
- W1966530008 hasPublicationYear "1995" @default.
- W1966530008 type Work @default.
- W1966530008 sameAs 1966530008 @default.
- W1966530008 citedByCount "1" @default.
- W1966530008 crossrefType "proceedings-article" @default.
- W1966530008 hasAuthorship W1966530008A5004664195 @default.
- W1966530008 hasAuthorship W1966530008A5006276271 @default.
- W1966530008 hasAuthorship W1966530008A5008624862 @default.
- W1966530008 hasAuthorship W1966530008A5045047044 @default.
- W1966530008 hasAuthorship W1966530008A5073775409 @default.
- W1966530008 hasAuthorship W1966530008A5085904418 @default.
- W1966530008 hasConcept C111919701 @default.
- W1966530008 hasConcept C113174947 @default.
- W1966530008 hasConcept C120665830 @default.
- W1966530008 hasConcept C121332964 @default.
- W1966530008 hasConcept C122523270 @default.
- W1966530008 hasConcept C1276947 @default.
- W1966530008 hasConcept C134306372 @default.
- W1966530008 hasConcept C160671074 @default.
- W1966530008 hasConcept C192562407 @default.
- W1966530008 hasConcept C204223013 @default.
- W1966530008 hasConcept C2777441419 @default.
- W1966530008 hasConcept C33923547 @default.
- W1966530008 hasConcept C41008148 @default.
- W1966530008 hasConcept C49040817 @default.
- W1966530008 hasConcept C98045186 @default.
- W1966530008 hasConceptScore W1966530008C111919701 @default.
- W1966530008 hasConceptScore W1966530008C113174947 @default.
- W1966530008 hasConceptScore W1966530008C120665830 @default.
- W1966530008 hasConceptScore W1966530008C121332964 @default.
- W1966530008 hasConceptScore W1966530008C122523270 @default.
- W1966530008 hasConceptScore W1966530008C1276947 @default.
- W1966530008 hasConceptScore W1966530008C134306372 @default.
- W1966530008 hasConceptScore W1966530008C160671074 @default.
- W1966530008 hasConceptScore W1966530008C192562407 @default.
- W1966530008 hasConceptScore W1966530008C204223013 @default.
- W1966530008 hasConceptScore W1966530008C2777441419 @default.
- W1966530008 hasConceptScore W1966530008C33923547 @default.
- W1966530008 hasConceptScore W1966530008C41008148 @default.
- W1966530008 hasConceptScore W1966530008C49040817 @default.
- W1966530008 hasConceptScore W1966530008C98045186 @default.
- W1966530008 hasLocation W19665300081 @default.
- W1966530008 hasOpenAccess W1966530008 @default.
- W1966530008 hasPrimaryLocation W19665300081 @default.
- W1966530008 hasRelatedWork W1973032943 @default.
- W1966530008 hasRelatedWork W1982372661 @default.
- W1966530008 hasRelatedWork W1983245528 @default.
- W1966530008 hasRelatedWork W2030045568 @default.
- W1966530008 hasRelatedWork W2032231047 @default.
- W1966530008 hasRelatedWork W2041013899 @default.
- W1966530008 hasRelatedWork W2043052804 @default.
- W1966530008 hasRelatedWork W2048861976 @default.
- W1966530008 hasRelatedWork W2057382384 @default.
- W1966530008 hasRelatedWork W2373571898 @default.
- W1966530008 isParatext "false" @default.
- W1966530008 isRetracted "false" @default.
- W1966530008 magId "1966530008" @default.
- W1966530008 workType "article" @default.