Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966575172> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1966575172 abstract "This paper describes that single crystalline 3C-SiC (cubic silicon carbide) thin films have been deposited on carbonized Si(100) substrates using hexamethyldisilane (HMDS, Si2(CH3)6) as a safe organosilane single precursor and a nonflammable mixture of Ar and H2 gas as the carrier gas by APCVD at 1280°C. The deposition was performed under various conditions to determine the optimized growth condition. The crystallinity of the 3C-SiC thin film was analyzed by XRD (X-ray diffraction). The surface morphology was also observed by AFM (atomic force microscopy) and voids between SiC and Si interfaces were measured by SEM (scanning electron microscopy). Finally, residual strain and hall mobility was investigated by surface profiler and hall measurement, respectively. From these results, the single crystalline 3C-SiC film had a good crystal quality without defects due to viods, a low residual stress, a very low roughness." @default.
- W1966575172 created "2016-06-24" @default.
- W1966575172 creator A5020035871 @default.
- W1966575172 creator A5028577029 @default.
- W1966575172 date "2010-02-01" @default.
- W1966575172 modified "2023-09-28" @default.
- W1966575172 title "Growth of Single Crystalline 3C-SiC Thin Films for High Power Devices by CVD" @default.
- W1966575172 cites W1990663683 @default.
- W1966575172 cites W1994609972 @default.
- W1966575172 cites W2008924171 @default.
- W1966575172 cites W2043140437 @default.
- W1966575172 cites W2047862086 @default.
- W1966575172 cites W2054983756 @default.
- W1966575172 cites W2056132123 @default.
- W1966575172 cites W2062339404 @default.
- W1966575172 cites W2145757162 @default.
- W1966575172 doi "https://doi.org/10.4313/jkem.2010.23.2.098" @default.
- W1966575172 hasPublicationYear "2010" @default.
- W1966575172 type Work @default.
- W1966575172 sameAs 1966575172 @default.
- W1966575172 citedByCount "0" @default.
- W1966575172 crossrefType "journal-article" @default.
- W1966575172 hasAuthorship W1966575172A5020035871 @default.
- W1966575172 hasAuthorship W1966575172A5028577029 @default.
- W1966575172 hasBestOaLocation W19665751721 @default.
- W1966575172 hasConcept C107365816 @default.
- W1966575172 hasConcept C113196181 @default.
- W1966575172 hasConcept C119599485 @default.
- W1966575172 hasConcept C120665830 @default.
- W1966575172 hasConcept C121332964 @default.
- W1966575172 hasConcept C127413603 @default.
- W1966575172 hasConcept C134112204 @default.
- W1966575172 hasConcept C159985019 @default.
- W1966575172 hasConcept C171250308 @default.
- W1966575172 hasConcept C185592680 @default.
- W1966575172 hasConcept C19067145 @default.
- W1966575172 hasConcept C192562407 @default.
- W1966575172 hasConcept C207114421 @default.
- W1966575172 hasConcept C26771246 @default.
- W1966575172 hasConcept C2780722187 @default.
- W1966575172 hasConcept C37292000 @default.
- W1966575172 hasConcept C42360764 @default.
- W1966575172 hasConcept C43617362 @default.
- W1966575172 hasConcept C46275449 @default.
- W1966575172 hasConcept C69990965 @default.
- W1966575172 hasConcept C71039073 @default.
- W1966575172 hasConcept C73922627 @default.
- W1966575172 hasConcept C8010536 @default.
- W1966575172 hasConceptScore W1966575172C107365816 @default.
- W1966575172 hasConceptScore W1966575172C113196181 @default.
- W1966575172 hasConceptScore W1966575172C119599485 @default.
- W1966575172 hasConceptScore W1966575172C120665830 @default.
- W1966575172 hasConceptScore W1966575172C121332964 @default.
- W1966575172 hasConceptScore W1966575172C127413603 @default.
- W1966575172 hasConceptScore W1966575172C134112204 @default.
- W1966575172 hasConceptScore W1966575172C159985019 @default.
- W1966575172 hasConceptScore W1966575172C171250308 @default.
- W1966575172 hasConceptScore W1966575172C185592680 @default.
- W1966575172 hasConceptScore W1966575172C19067145 @default.
- W1966575172 hasConceptScore W1966575172C192562407 @default.
- W1966575172 hasConceptScore W1966575172C207114421 @default.
- W1966575172 hasConceptScore W1966575172C26771246 @default.
- W1966575172 hasConceptScore W1966575172C2780722187 @default.
- W1966575172 hasConceptScore W1966575172C37292000 @default.
- W1966575172 hasConceptScore W1966575172C42360764 @default.
- W1966575172 hasConceptScore W1966575172C43617362 @default.
- W1966575172 hasConceptScore W1966575172C46275449 @default.
- W1966575172 hasConceptScore W1966575172C69990965 @default.
- W1966575172 hasConceptScore W1966575172C71039073 @default.
- W1966575172 hasConceptScore W1966575172C73922627 @default.
- W1966575172 hasConceptScore W1966575172C8010536 @default.
- W1966575172 hasLocation W19665751721 @default.
- W1966575172 hasOpenAccess W1966575172 @default.
- W1966575172 hasPrimaryLocation W19665751721 @default.
- W1966575172 hasRelatedWork W194541223 @default.
- W1966575172 hasRelatedWork W1964240037 @default.
- W1966575172 hasRelatedWork W2031594046 @default.
- W1966575172 hasRelatedWork W2039855953 @default.
- W1966575172 hasRelatedWork W2040524400 @default.
- W1966575172 hasRelatedWork W2049919375 @default.
- W1966575172 hasRelatedWork W2057053975 @default.
- W1966575172 hasRelatedWork W2057214369 @default.
- W1966575172 hasRelatedWork W2061767208 @default.
- W1966575172 hasRelatedWork W2104568974 @default.
- W1966575172 hasRelatedWork W2113758669 @default.
- W1966575172 hasRelatedWork W2119076727 @default.
- W1966575172 hasRelatedWork W2120871930 @default.
- W1966575172 hasRelatedWork W2153485337 @default.
- W1966575172 hasRelatedWork W2154726463 @default.
- W1966575172 hasRelatedWork W2325903163 @default.
- W1966575172 hasRelatedWork W2328316264 @default.
- W1966575172 hasRelatedWork W2611785872 @default.
- W1966575172 hasRelatedWork W628498393 @default.
- W1966575172 hasRelatedWork W658207039 @default.
- W1966575172 isParatext "false" @default.
- W1966575172 isRetracted "false" @default.
- W1966575172 magId "1966575172" @default.
- W1966575172 workType "article" @default.