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- W1966581454 abstract "This paper presents a novel electrical isolation technology using honeycomb-shaped, high-aspect-ratio trench oxide posts, that double as both the insulators and the support for single-crystal silicon MEMS. When combined with Surface/Bulk Micromachining (SBM) technology, this method can be used to fabricate single-crystal silicon MEMS, without the use of expensive Silicon-On-Insulator (SOI) wafers. Furthermore, this technology does not suffer adversely from oxide film residual stress, which can cause released beams to break." @default.
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- W1966581454 date "2002-04-01" @default.
- W1966581454 modified "2023-10-18" @default.
- W1966581454 title "Honeycomb-shaped deep-trench oxide posts combined with the SBM technology for micromachining single-crystal silicon without using SOI" @default.
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- W1966581454 doi "https://doi.org/10.1016/s0924-4247(02)00013-4" @default.
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