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- W1966648720 abstract "We present microelectromechanical system (MEMS) RF component architectures that enable reconfigurable MEMS millimeterwave transceivers. In this paper, we focus on the component architectures for system integration. Different components, including reconfigurable Vee-antennas, planar impedance tuners, microswitches and variable capacitors, are demonstrated using the same three-polysilicon-layer processes. The reconfigurability of the Vee-antenna is demonstrated with beam-steering and beam-shaping functionality. The tuning ranges of planar backshort impedance tuners on different transmission lines are studied. We show that it is feasible to integrate the reconfigurable Vee-antenna with the planar impedance tuners. The mechanical architectures for microswitches, parallel- plate variable capacitors and circular variable capacitors are also investigated." @default.
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- W1966648720 date "1999-11-12" @default.
- W1966648720 modified "2023-10-03" @default.
- W1966648720 title "MEMS millimeter-wave reconfigurable components" @default.
- W1966648720 cites W2019101199 @default.
- W1966648720 doi "https://doi.org/10.1117/12.370211" @default.
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