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- W1966648755 endingPage "1263" @default.
- W1966648755 startingPage "1263" @default.
- W1966648755 abstract "Planar junctions in silicon can be degraded electrically by the growth of an oxide on the surface, particularly if the oxidation is carried out at low temperatures and at rapid rates. It is suggested here that the mechanism of degradation involves the formation of shallow dislocation loops due to dopant pile‐up at the surface as the oxide grows, followed by the precipitation of fast‐diffusing impurities about these defects. High‐temperature oxidation, especially at low growth rates, minimizes this problem." @default.
- W1966648755 created "2016-06-24" @default.
- W1966648755 creator A5002409269 @default.
- W1966648755 creator A5008942508 @default.
- W1966648755 creator A5068269898 @default.
- W1966648755 date "1964-01-01" @default.
- W1966648755 modified "2023-09-26" @default.
- W1966648755 title "Degradation of Planar Junctions during Reoxidation" @default.
- W1966648755 doi "https://doi.org/10.1149/1.2425974" @default.
- W1966648755 hasPublicationYear "1964" @default.
- W1966648755 type Work @default.
- W1966648755 sameAs 1966648755 @default.
- W1966648755 citedByCount "3" @default.
- W1966648755 crossrefType "journal-article" @default.
- W1966648755 hasAuthorship W1966648755A5002409269 @default.
- W1966648755 hasAuthorship W1966648755A5008942508 @default.
- W1966648755 hasAuthorship W1966648755A5068269898 @default.
- W1966648755 hasConcept C107054158 @default.
- W1966648755 hasConcept C121332964 @default.
- W1966648755 hasConcept C121684516 @default.
- W1966648755 hasConcept C127413603 @default.
- W1966648755 hasConcept C134786449 @default.
- W1966648755 hasConcept C153294291 @default.
- W1966648755 hasConcept C159122135 @default.
- W1966648755 hasConcept C159467904 @default.
- W1966648755 hasConcept C159985019 @default.
- W1966648755 hasConcept C178790620 @default.
- W1966648755 hasConcept C185592680 @default.
- W1966648755 hasConcept C191897082 @default.
- W1966648755 hasConcept C191952053 @default.
- W1966648755 hasConcept C192562407 @default.
- W1966648755 hasConcept C24326235 @default.
- W1966648755 hasConcept C2779679103 @default.
- W1966648755 hasConcept C2779851234 @default.
- W1966648755 hasConcept C41008148 @default.
- W1966648755 hasConcept C42360764 @default.
- W1966648755 hasConcept C49040817 @default.
- W1966648755 hasConcept C544956773 @default.
- W1966648755 hasConcept C57863236 @default.
- W1966648755 hasConcept C71987851 @default.
- W1966648755 hasConceptScore W1966648755C107054158 @default.
- W1966648755 hasConceptScore W1966648755C121332964 @default.
- W1966648755 hasConceptScore W1966648755C121684516 @default.
- W1966648755 hasConceptScore W1966648755C127413603 @default.
- W1966648755 hasConceptScore W1966648755C134786449 @default.
- W1966648755 hasConceptScore W1966648755C153294291 @default.
- W1966648755 hasConceptScore W1966648755C159122135 @default.
- W1966648755 hasConceptScore W1966648755C159467904 @default.
- W1966648755 hasConceptScore W1966648755C159985019 @default.
- W1966648755 hasConceptScore W1966648755C178790620 @default.
- W1966648755 hasConceptScore W1966648755C185592680 @default.
- W1966648755 hasConceptScore W1966648755C191897082 @default.
- W1966648755 hasConceptScore W1966648755C191952053 @default.
- W1966648755 hasConceptScore W1966648755C192562407 @default.
- W1966648755 hasConceptScore W1966648755C24326235 @default.
- W1966648755 hasConceptScore W1966648755C2779679103 @default.
- W1966648755 hasConceptScore W1966648755C2779851234 @default.
- W1966648755 hasConceptScore W1966648755C41008148 @default.
- W1966648755 hasConceptScore W1966648755C42360764 @default.
- W1966648755 hasConceptScore W1966648755C49040817 @default.
- W1966648755 hasConceptScore W1966648755C544956773 @default.
- W1966648755 hasConceptScore W1966648755C57863236 @default.
- W1966648755 hasConceptScore W1966648755C71987851 @default.
- W1966648755 hasIssue "11" @default.
- W1966648755 hasLocation W19666487551 @default.
- W1966648755 hasOpenAccess W1966648755 @default.
- W1966648755 hasPrimaryLocation W19666487551 @default.
- W1966648755 hasRelatedWork W146098997 @default.
- W1966648755 hasRelatedWork W1992651547 @default.
- W1966648755 hasRelatedWork W2000624340 @default.
- W1966648755 hasRelatedWork W2016394858 @default.
- W1966648755 hasRelatedWork W2017633590 @default.
- W1966648755 hasRelatedWork W2024400925 @default.
- W1966648755 hasRelatedWork W2047476251 @default.
- W1966648755 hasRelatedWork W2131433107 @default.
- W1966648755 hasRelatedWork W3175165439 @default.
- W1966648755 hasRelatedWork W4214938698 @default.
- W1966648755 hasVolume "111" @default.
- W1966648755 isParatext "false" @default.
- W1966648755 isRetracted "false" @default.
- W1966648755 magId "1966648755" @default.
- W1966648755 workType "article" @default.