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- W1966656485 abstract "Abstract Individually addressed Si-bipolar diodes stacked monolithically in two planes were fabricated, applying a variety of novel technologies. A two-step differential Si-MBE process allows us to grow monocrystalline devices embedded in a poly-Si surrounding which provides lateral or vertical isolation and buried interconnections. The doping levels of the active devices ( n , p ≲ 10 17 cm −3 ) are concomitant with a high resistivity poly surrounding (10 4 -10 5 Ω cm), while highly doped contact layers (> 10 19 cm −3 ), grown between the two device levels and above the second level are of low resistivity in the monocrystalline (10 −3 -10 −1 Ω cm) and in the poly area (10 −2 −5 × 10 −1 Ω cm). MBE-growth was interrupted after deposition of the intermediate contact layer to define interconnections by photo-lithography, which were subsequently overgrown by a second MBE process. Patterning of the highly conductive cap layer and etching of contact holes to the by now buried leads permits electrical access to both device levels. The measured device characteristics demonstrate the feasibility of the concept, which also appears very attractive for three-terminal devices. Routes towards optimized growth and doping sequences are discussed." @default.
- W1966656485 created "2016-06-24" @default.
- W1966656485 creator A5017998235 @default.
- W1966656485 creator A5031787373 @default.
- W1966656485 creator A5066078590 @default.
- W1966656485 date "1991-06-01" @default.
- W1966656485 modified "2023-10-02" @default.
- W1966656485 title "Stacked Si-bipolar diodes with lateral polycrystalline inter-connections grown by two-step MBE" @default.
- W1966656485 cites W1968956607 @default.
- W1966656485 cites W1983720641 @default.
- W1966656485 cites W1998414791 @default.
- W1966656485 cites W2007935031 @default.
- W1966656485 cites W2024686880 @default.
- W1966656485 cites W2034823108 @default.
- W1966656485 cites W2087373564 @default.
- W1966656485 cites W2120587956 @default.
- W1966656485 cites W2153376746 @default.
- W1966656485 cites W2154927656 @default.
- W1966656485 doi "https://doi.org/10.1016/0038-1101(91)90140-t" @default.
- W1966656485 hasPublicationYear "1991" @default.
- W1966656485 type Work @default.
- W1966656485 sameAs 1966656485 @default.
- W1966656485 citedByCount "0" @default.
- W1966656485 crossrefType "journal-article" @default.
- W1966656485 hasAuthorship W1966656485A5017998235 @default.
- W1966656485 hasAuthorship W1966656485A5031787373 @default.
- W1966656485 hasAuthorship W1966656485A5066078590 @default.
- W1966656485 hasConcept C100460472 @default.
- W1966656485 hasConcept C119599485 @default.
- W1966656485 hasConcept C127413603 @default.
- W1966656485 hasConcept C165801399 @default.
- W1966656485 hasConcept C171250308 @default.
- W1966656485 hasConcept C192562407 @default.
- W1966656485 hasConcept C26953177 @default.
- W1966656485 hasConcept C2779227376 @default.
- W1966656485 hasConcept C49040817 @default.
- W1966656485 hasConcept C50942859 @default.
- W1966656485 hasConcept C544956773 @default.
- W1966656485 hasConcept C57863236 @default.
- W1966656485 hasConcept C69990965 @default.
- W1966656485 hasConcept C78434282 @default.
- W1966656485 hasConceptScore W1966656485C100460472 @default.
- W1966656485 hasConceptScore W1966656485C119599485 @default.
- W1966656485 hasConceptScore W1966656485C127413603 @default.
- W1966656485 hasConceptScore W1966656485C165801399 @default.
- W1966656485 hasConceptScore W1966656485C171250308 @default.
- W1966656485 hasConceptScore W1966656485C192562407 @default.
- W1966656485 hasConceptScore W1966656485C26953177 @default.
- W1966656485 hasConceptScore W1966656485C2779227376 @default.
- W1966656485 hasConceptScore W1966656485C49040817 @default.
- W1966656485 hasConceptScore W1966656485C50942859 @default.
- W1966656485 hasConceptScore W1966656485C544956773 @default.
- W1966656485 hasConceptScore W1966656485C57863236 @default.
- W1966656485 hasConceptScore W1966656485C69990965 @default.
- W1966656485 hasConceptScore W1966656485C78434282 @default.
- W1966656485 hasLocation W19666564851 @default.
- W1966656485 hasOpenAccess W1966656485 @default.
- W1966656485 hasPrimaryLocation W19666564851 @default.
- W1966656485 hasRelatedWork W188104919 @default.
- W1966656485 hasRelatedWork W1980546204 @default.
- W1966656485 hasRelatedWork W1981425780 @default.
- W1966656485 hasRelatedWork W1988178818 @default.
- W1966656485 hasRelatedWork W2013950788 @default.
- W1966656485 hasRelatedWork W2029308946 @default.
- W1966656485 hasRelatedWork W2034466417 @default.
- W1966656485 hasRelatedWork W2044567242 @default.
- W1966656485 hasRelatedWork W2060174143 @default.
- W1966656485 hasRelatedWork W2071460414 @default.
- W1966656485 hasRelatedWork W2087323378 @default.
- W1966656485 hasRelatedWork W2117739782 @default.
- W1966656485 hasRelatedWork W2136172476 @default.
- W1966656485 hasRelatedWork W2774430533 @default.
- W1966656485 hasRelatedWork W1874333970 @default.
- W1966656485 hasRelatedWork W2284775737 @default.
- W1966656485 hasRelatedWork W2472391844 @default.
- W1966656485 hasRelatedWork W2509655318 @default.
- W1966656485 hasRelatedWork W2815179563 @default.
- W1966656485 hasRelatedWork W2858342026 @default.
- W1966656485 isParatext "false" @default.
- W1966656485 isRetracted "false" @default.
- W1966656485 magId "1966656485" @default.
- W1966656485 workType "article" @default.