Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966811466> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W1966811466 endingPage "8059" @default.
- W1966811466 startingPage "8054" @default.
- W1966811466 abstract "Czochralski-grown silicon wafers doped with phosphorus (∼1014 cm−3) have been annealed in nitrogen, wet nitrogen, oxygen, argon, and vacuum ambients at 470 °C for times up to 500 h. Sample characterization was made using predominantly electrical techniques such as admittance spectroscopy and thermally stimulated capacitance measurements but also secondary ion mass spectrometry (SIMS) and Fourier transform infrared spectroscopy were employed. In all samples, an increasing concentration of free carrier electrons is observed with increasing annealing time, reaching a maximum of ∼1016 cm−3 at 100 h. For durations in excess of 100 h gradual decrease of the free electron concentration takes place except for the samples treated in wet nitrogen and oxygen atmospheres, which display donors stable even after 200 h. These stable centers are found to have shallower donor level positions in the energy band gap (∼25 meV below the conduction band edge Ec) than those of the centers formed in vacuum, argon, and nitrogen atmospheres (∼35 meV below Ec). The latter centers are associated with the well-established shallow thermal donors (STDs) while the origin of the former ones, which are labeled ultrashallow thermal donors (USTDs) is less known. However, on the basis of a wealth of experimental results we show that the USTDs are most likely perturbated STDs modified through interaction with fast-in diffusing oxygen species, possibly oxygen dimers. Further, comparison between the electrical data and the SIMS measurements reveals unambiguously that neither the STD nor the USTD centers involve nitrogen, in contrast to recent suggestions in the literature." @default.
- W1966811466 created "2016-06-24" @default.
- W1966811466 creator A5008179943 @default.
- W1966811466 creator A5068004534 @default.
- W1966811466 creator A5074917182 @default.
- W1966811466 creator A5082436280 @default.
- W1966811466 creator A5090300047 @default.
- W1966811466 date "1999-06-15" @default.
- W1966811466 modified "2023-10-03" @default.
- W1966811466 title "Ultrashallow thermal donor formation in silicon by annealing in ambient oxygen" @default.
- W1966811466 cites W1970945394 @default.
- W1966811466 cites W1983595367 @default.
- W1966811466 cites W1991197914 @default.
- W1966811466 cites W2000640227 @default.
- W1966811466 cites W2003268039 @default.
- W1966811466 cites W2025696930 @default.
- W1966811466 cites W2031440578 @default.
- W1966811466 cites W2033683480 @default.
- W1966811466 cites W2034817111 @default.
- W1966811466 cites W2037510699 @default.
- W1966811466 cites W2038285257 @default.
- W1966811466 cites W2056930883 @default.
- W1966811466 cites W2061606099 @default.
- W1966811466 cites W2065936993 @default.
- W1966811466 cites W2069527114 @default.
- W1966811466 cites W2070922647 @default.
- W1966811466 cites W2086099069 @default.
- W1966811466 cites W2092757271 @default.
- W1966811466 cites W2117792882 @default.
- W1966811466 cites W4362194815 @default.
- W1966811466 doi "https://doi.org/10.1063/1.370642" @default.
- W1966811466 hasPublicationYear "1999" @default.
- W1966811466 type Work @default.
- W1966811466 sameAs 1966811466 @default.
- W1966811466 citedByCount "5" @default.
- W1966811466 countsByYear W19668114662015 @default.
- W1966811466 crossrefType "journal-article" @default.
- W1966811466 hasAuthorship W1966811466A5008179943 @default.
- W1966811466 hasAuthorship W1966811466A5068004534 @default.
- W1966811466 hasAuthorship W1966811466A5074917182 @default.
- W1966811466 hasAuthorship W1966811466A5082436280 @default.
- W1966811466 hasAuthorship W1966811466A5090300047 @default.
- W1966811466 hasConcept C113196181 @default.
- W1966811466 hasConcept C153642686 @default.
- W1966811466 hasConcept C162356407 @default.
- W1966811466 hasConcept C178790620 @default.
- W1966811466 hasConcept C185592680 @default.
- W1966811466 hasConcept C191897082 @default.
- W1966811466 hasConcept C192562407 @default.
- W1966811466 hasConcept C207521374 @default.
- W1966811466 hasConcept C2777855556 @default.
- W1966811466 hasConcept C2780304102 @default.
- W1966811466 hasConcept C43617362 @default.
- W1966811466 hasConcept C49040817 @default.
- W1966811466 hasConcept C537208039 @default.
- W1966811466 hasConcept C540031477 @default.
- W1966811466 hasConcept C544956773 @default.
- W1966811466 hasConcept C547737533 @default.
- W1966811466 hasConcept C57863236 @default.
- W1966811466 hasConcept C77671233 @default.
- W1966811466 hasConceptScore W1966811466C113196181 @default.
- W1966811466 hasConceptScore W1966811466C153642686 @default.
- W1966811466 hasConceptScore W1966811466C162356407 @default.
- W1966811466 hasConceptScore W1966811466C178790620 @default.
- W1966811466 hasConceptScore W1966811466C185592680 @default.
- W1966811466 hasConceptScore W1966811466C191897082 @default.
- W1966811466 hasConceptScore W1966811466C192562407 @default.
- W1966811466 hasConceptScore W1966811466C207521374 @default.
- W1966811466 hasConceptScore W1966811466C2777855556 @default.
- W1966811466 hasConceptScore W1966811466C2780304102 @default.
- W1966811466 hasConceptScore W1966811466C43617362 @default.
- W1966811466 hasConceptScore W1966811466C49040817 @default.
- W1966811466 hasConceptScore W1966811466C537208039 @default.
- W1966811466 hasConceptScore W1966811466C540031477 @default.
- W1966811466 hasConceptScore W1966811466C544956773 @default.
- W1966811466 hasConceptScore W1966811466C547737533 @default.
- W1966811466 hasConceptScore W1966811466C57863236 @default.
- W1966811466 hasConceptScore W1966811466C77671233 @default.
- W1966811466 hasIssue "12" @default.
- W1966811466 hasLocation W19668114661 @default.
- W1966811466 hasOpenAccess W1966811466 @default.
- W1966811466 hasPrimaryLocation W19668114661 @default.
- W1966811466 hasRelatedWork W2010781704 @default.
- W1966811466 hasRelatedWork W2018127722 @default.
- W1966811466 hasRelatedWork W2033143849 @default.
- W1966811466 hasRelatedWork W2038285257 @default.
- W1966811466 hasRelatedWork W2046894850 @default.
- W1966811466 hasRelatedWork W2080075196 @default.
- W1966811466 hasRelatedWork W2083903741 @default.
- W1966811466 hasRelatedWork W2088081281 @default.
- W1966811466 hasRelatedWork W2092757271 @default.
- W1966811466 hasRelatedWork W2124745780 @default.
- W1966811466 hasVolume "85" @default.
- W1966811466 isParatext "false" @default.
- W1966811466 isRetracted "false" @default.
- W1966811466 magId "1966811466" @default.
- W1966811466 workType "article" @default.