Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966818311> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W1966818311 abstract "Low temperature direct wafer bonding was performed in vacuum. Different loads were applied during bonding processes. In all cases, the bond strength is above 19 MPa, which is high enough for practical applications. More interestingly, in contrast to the findings by others, we found that the applied load does play a very important role in wafer bonding, the higher the applied load, the lower the bond strength. The bonded wafers were examined by means of scanning acoustic microscope (SAM). It was found that both the bubble size and bubble number increase with an increase in applied load. This phenomenon is contributed to the applied load. High applied force keeps two wafer surfaces in tight contact. If there is any gas trapped during bonding process, such as hydrogen and water molecules, the tight contact prevents them from escaping out of the bonding interfaces, which results in the low bond strength. It also can be explained by one low temperature direct wafer bonding model." @default.
- W1966818311 created "2016-06-24" @default.
- W1966818311 creator A5001733016 @default.
- W1966818311 creator A5009611141 @default.
- W1966818311 creator A5045004316 @default.
- W1966818311 creator A5057748525 @default.
- W1966818311 creator A5077875089 @default.
- W1966818311 date "2003-06-01" @default.
- W1966818311 modified "2023-09-27" @default.
- W1966818311 title "INFLUENCE OF APPLIED LOAD ON WAFER BONDING IN VACUUM" @default.
- W1966818311 cites W1977747200 @default.
- W1966818311 cites W1978002271 @default.
- W1966818311 cites W1986456852 @default.
- W1966818311 cites W1992329450 @default.
- W1966818311 cites W1994196515 @default.
- W1966818311 cites W2001399601 @default.
- W1966818311 cites W2023833901 @default.
- W1966818311 cites W2027516477 @default.
- W1966818311 cites W2057976060 @default.
- W1966818311 cites W2081539999 @default.
- W1966818311 doi "https://doi.org/10.1142/s1465876303001253" @default.
- W1966818311 hasPublicationYear "2003" @default.
- W1966818311 type Work @default.
- W1966818311 sameAs 1966818311 @default.
- W1966818311 citedByCount "1" @default.
- W1966818311 crossrefType "journal-article" @default.
- W1966818311 hasAuthorship W1966818311A5001733016 @default.
- W1966818311 hasAuthorship W1966818311A5009611141 @default.
- W1966818311 hasAuthorship W1966818311A5045004316 @default.
- W1966818311 hasAuthorship W1966818311A5057748525 @default.
- W1966818311 hasAuthorship W1966818311A5077875089 @default.
- W1966818311 hasConcept C112887158 @default.
- W1966818311 hasConcept C120665830 @default.
- W1966818311 hasConcept C121332964 @default.
- W1966818311 hasConcept C147080431 @default.
- W1966818311 hasConcept C157915830 @default.
- W1966818311 hasConcept C159096172 @default.
- W1966818311 hasConcept C159985019 @default.
- W1966818311 hasConcept C160671074 @default.
- W1966818311 hasConcept C171250308 @default.
- W1966818311 hasConcept C178790620 @default.
- W1966818311 hasConcept C185592680 @default.
- W1966818311 hasConcept C192562407 @default.
- W1966818311 hasConcept C201414436 @default.
- W1966818311 hasConcept C201845621 @default.
- W1966818311 hasConcept C2778759172 @default.
- W1966818311 hasConcept C2779133538 @default.
- W1966818311 hasConcept C2779227376 @default.
- W1966818311 hasConcept C2781117724 @default.
- W1966818311 hasConcept C2984173401 @default.
- W1966818311 hasConcept C32909587 @default.
- W1966818311 hasConcept C57879066 @default.
- W1966818311 hasConcept C68928338 @default.
- W1966818311 hasConceptScore W1966818311C112887158 @default.
- W1966818311 hasConceptScore W1966818311C120665830 @default.
- W1966818311 hasConceptScore W1966818311C121332964 @default.
- W1966818311 hasConceptScore W1966818311C147080431 @default.
- W1966818311 hasConceptScore W1966818311C157915830 @default.
- W1966818311 hasConceptScore W1966818311C159096172 @default.
- W1966818311 hasConceptScore W1966818311C159985019 @default.
- W1966818311 hasConceptScore W1966818311C160671074 @default.
- W1966818311 hasConceptScore W1966818311C171250308 @default.
- W1966818311 hasConceptScore W1966818311C178790620 @default.
- W1966818311 hasConceptScore W1966818311C185592680 @default.
- W1966818311 hasConceptScore W1966818311C192562407 @default.
- W1966818311 hasConceptScore W1966818311C201414436 @default.
- W1966818311 hasConceptScore W1966818311C201845621 @default.
- W1966818311 hasConceptScore W1966818311C2778759172 @default.
- W1966818311 hasConceptScore W1966818311C2779133538 @default.
- W1966818311 hasConceptScore W1966818311C2779227376 @default.
- W1966818311 hasConceptScore W1966818311C2781117724 @default.
- W1966818311 hasConceptScore W1966818311C2984173401 @default.
- W1966818311 hasConceptScore W1966818311C32909587 @default.
- W1966818311 hasConceptScore W1966818311C57879066 @default.
- W1966818311 hasConceptScore W1966818311C68928338 @default.
- W1966818311 hasLocation W19668183111 @default.
- W1966818311 hasOpenAccess W1966818311 @default.
- W1966818311 hasPrimaryLocation W19668183111 @default.
- W1966818311 hasRelatedWork W1534423317 @default.
- W1966818311 hasRelatedWork W1921746710 @default.
- W1966818311 hasRelatedWork W1973473696 @default.
- W1966818311 hasRelatedWork W2052461205 @default.
- W1966818311 hasRelatedWork W2113107899 @default.
- W1966818311 hasRelatedWork W2138504261 @default.
- W1966818311 hasRelatedWork W2153160607 @default.
- W1966818311 hasRelatedWork W2160913304 @default.
- W1966818311 hasRelatedWork W2467481148 @default.
- W1966818311 hasRelatedWork W2911999722 @default.
- W1966818311 isParatext "false" @default.
- W1966818311 isRetracted "false" @default.
- W1966818311 magId "1966818311" @default.
- W1966818311 workType "article" @default.