Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966871878> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1966871878 endingPage "173" @default.
- W1966871878 startingPage "168" @default.
- W1966871878 abstract "A 1-Mbit DRAM with 0.5-µm minimum linewidth is fabricated using variable shaped e-beam direct writing technology. A simple linewidth control technique using newly developed submicrometer resists is developed to achieve high resolution and better linewidth accuracy. In addition, a highly accurate registration technique is developed to ensure required overlay. These techniques are successfully used to achieve overlay accuracy of 0.04 µm(σ) and linewidth deviation of 0.018 µm(σ) in the fabrication." @default.
- W1966871878 created "2016-06-24" @default.
- W1966871878 creator A5054685075 @default.
- W1966871878 creator A5057396131 @default.
- W1966871878 creator A5059024390 @default.
- W1966871878 creator A5077808503 @default.
- W1966871878 creator A5079225244 @default.
- W1966871878 creator A5090411944 @default.
- W1966871878 date "1985-02-01" @default.
- W1966871878 modified "2023-09-27" @default.
- W1966871878 title "Submicrometer electron-beam direct writing technology for 1-Mbit DRAM fabrication" @default.
- W1966871878 cites W1967179692 @default.
- W1966871878 cites W1978810938 @default.
- W1966871878 cites W1992030451 @default.
- W1966871878 cites W2016642728 @default.
- W1966871878 cites W2085362710 @default.
- W1966871878 cites W2162093634 @default.
- W1966871878 doi "https://doi.org/10.1109/t-ed.1985.21926" @default.
- W1966871878 hasPublicationYear "1985" @default.
- W1966871878 type Work @default.
- W1966871878 sameAs 1966871878 @default.
- W1966871878 citedByCount "1" @default.
- W1966871878 crossrefType "journal-article" @default.
- W1966871878 hasAuthorship W1966871878A5054685075 @default.
- W1966871878 hasAuthorship W1966871878A5057396131 @default.
- W1966871878 hasAuthorship W1966871878A5059024390 @default.
- W1966871878 hasAuthorship W1966871878A5077808503 @default.
- W1966871878 hasAuthorship W1966871878A5079225244 @default.
- W1966871878 hasAuthorship W1966871878A5090411944 @default.
- W1966871878 hasConcept C120665830 @default.
- W1966871878 hasConcept C121332964 @default.
- W1966871878 hasConcept C127413603 @default.
- W1966871878 hasConcept C136085584 @default.
- W1966871878 hasConcept C136525101 @default.
- W1966871878 hasConcept C142181693 @default.
- W1966871878 hasConcept C142724271 @default.
- W1966871878 hasConcept C185177783 @default.
- W1966871878 hasConcept C192562407 @default.
- W1966871878 hasConcept C199360897 @default.
- W1966871878 hasConcept C204787440 @default.
- W1966871878 hasConcept C24326235 @default.
- W1966871878 hasConcept C41008148 @default.
- W1966871878 hasConcept C49040817 @default.
- W1966871878 hasConcept C520434653 @default.
- W1966871878 hasConcept C71924100 @default.
- W1966871878 hasConcept C7366592 @default.
- W1966871878 hasConceptScore W1966871878C120665830 @default.
- W1966871878 hasConceptScore W1966871878C121332964 @default.
- W1966871878 hasConceptScore W1966871878C127413603 @default.
- W1966871878 hasConceptScore W1966871878C136085584 @default.
- W1966871878 hasConceptScore W1966871878C136525101 @default.
- W1966871878 hasConceptScore W1966871878C142181693 @default.
- W1966871878 hasConceptScore W1966871878C142724271 @default.
- W1966871878 hasConceptScore W1966871878C185177783 @default.
- W1966871878 hasConceptScore W1966871878C192562407 @default.
- W1966871878 hasConceptScore W1966871878C199360897 @default.
- W1966871878 hasConceptScore W1966871878C204787440 @default.
- W1966871878 hasConceptScore W1966871878C24326235 @default.
- W1966871878 hasConceptScore W1966871878C41008148 @default.
- W1966871878 hasConceptScore W1966871878C49040817 @default.
- W1966871878 hasConceptScore W1966871878C520434653 @default.
- W1966871878 hasConceptScore W1966871878C71924100 @default.
- W1966871878 hasConceptScore W1966871878C7366592 @default.
- W1966871878 hasIssue "2" @default.
- W1966871878 hasLocation W19668718781 @default.
- W1966871878 hasOpenAccess W1966871878 @default.
- W1966871878 hasPrimaryLocation W19668718781 @default.
- W1966871878 hasRelatedWork W1963883074 @default.
- W1966871878 hasRelatedWork W1966871878 @default.
- W1966871878 hasRelatedWork W1989207937 @default.
- W1966871878 hasRelatedWork W1995772178 @default.
- W1966871878 hasRelatedWork W2011613489 @default.
- W1966871878 hasRelatedWork W2014422307 @default.
- W1966871878 hasRelatedWork W2077104778 @default.
- W1966871878 hasRelatedWork W2079379489 @default.
- W1966871878 hasRelatedWork W2155719671 @default.
- W1966871878 hasRelatedWork W2899084033 @default.
- W1966871878 hasVolume "32" @default.
- W1966871878 isParatext "false" @default.
- W1966871878 isRetracted "false" @default.
- W1966871878 magId "1966871878" @default.
- W1966871878 workType "article" @default.