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- W1966883483 abstract "Thermal stability of cosputtered amorphous W60Zr40 films, 110 nm thick on both, Si and SiO2 with various metal overlayers, is investigated by backscattering spectrometry and X-ray diffraction. The samples are vacuum-annealed for 30 min between 450 and 900 °C. The crystallization temperature of amorphous W60Zr40 on SiO2 as determined by X-ray diffraction is 900 °C. On Si, the amorphous film begins to react with the substrate at 725 °C and forms a polycrystalline layer of tungsten and zirconium silicide. With an evaporated metal overlayer of Ag, Al, Au, or Ni, the amorphous W-Zr film on a SiO2 substrate interacts with the overlayer between 500 to 600 °C, except for Au which reacts at 400 °C.La stabilite thermique de films W60Zr40 amorphes deposes sur Si et SiO2 et recouverts de differentes couches metalliques a ete par retrodiffusion et diffraction X. Les echantillons ont ete recuits sous vide pendant 30 min entre 450 et 900 °C. La temperature de cristallisation de W60Zr40 amorphe sur SiO2 determinee par diffraction X est de 900 °C. Sur Si, le film amorphe reagit avec le substrat a 725 °C et forme une couche polycristalline de W et siliciure de Zr. Lorsqu'il est recouvert d'une couche de metal tel que Ag, Al, Au ou Ni, le W-Zr amorphe regit avee le metal entre 500 et 600 °C, excepte l'or qui reagit a 400 °C." @default.
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- W1966883483 date "1984-12-16" @default.
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- W1966883483 title "Investigation of amorphous W60Zr40 film as a diffusion barrier in metallization schemes" @default.
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- W1966883483 doi "https://doi.org/10.1002/pssa.2210860202" @default.
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