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- W1966892337 abstract "Abstract The strain and orientation of buried and surface CoSi 2 layers have been studied in a thickness range from 160 to 600 A. Using different implantation energies and doses, a unique combination of CoSi 2 epitaxial layers was obtained having the same strain but a variable orientation. These novel structures are interesting for epitaxial growth studies and may have important device applications." @default.
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- W1966892337 date "1991-11-01" @default.
- W1966892337 modified "2023-09-27" @default.
- W1966892337 title "Structural properties of thin silicide layers formed by high-dose metal implantation" @default.
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