Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966977894> ?p ?o ?g. }
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- W1966977894 endingPage "145" @default.
- W1966977894 startingPage "145" @default.
- W1966977894 abstract "The stress hump phenomenon observed at a low temperature of approximately 140°C during in situ stress-temperature measurement of sputtered Ni thin film on a (001) Si substrate has been investigated. We found that the stress hump was not related to the formation of NiSi 2 , but originated from the thickening of an amorphous Ni–Si intermixing layer in the temperature range of 100–140°C followed by the formation of the Ni 2 Si phase at temperatures above 140°C." @default.
- W1966977894 created "2016-06-24" @default.
- W1966977894 creator A5043468298 @default.
- W1966977894 creator A5048137344 @default.
- W1966977894 creator A5071390219 @default.
- W1966977894 creator A5075494274 @default.
- W1966977894 date "2005-01-01" @default.
- W1966977894 modified "2023-09-23" @default.
- W1966977894 title "Characterization of Low-Temperature Stress Hump in Relation to Phase Formation Sequence of Nickel Silicide" @default.
- W1966977894 cites W1975171596 @default.
- W1966977894 cites W1997801760 @default.
- W1966977894 cites W2004330154 @default.
- W1966977894 cites W2024371952 @default.
- W1966977894 cites W2033845639 @default.
- W1966977894 cites W2048013577 @default.
- W1966977894 cites W2068252400 @default.
- W1966977894 doi "https://doi.org/10.1143/jjap.44.145" @default.
- W1966977894 hasPublicationYear "2005" @default.
- W1966977894 type Work @default.
- W1966977894 sameAs 1966977894 @default.
- W1966977894 citedByCount "2" @default.
- W1966977894 countsByYear W19669778942012 @default.
- W1966977894 countsByYear W19669778942013 @default.
- W1966977894 crossrefType "journal-article" @default.
- W1966977894 hasAuthorship W1966977894A5043468298 @default.
- W1966977894 hasAuthorship W1966977894A5048137344 @default.
- W1966977894 hasAuthorship W1966977894A5071390219 @default.
- W1966977894 hasAuthorship W1966977894A5075494274 @default.
- W1966977894 hasBestOaLocation W19669778942 @default.
- W1966977894 hasConcept C111368507 @default.
- W1966977894 hasConcept C121332964 @default.
- W1966977894 hasConcept C126348684 @default.
- W1966977894 hasConcept C127313418 @default.
- W1966977894 hasConcept C138885662 @default.
- W1966977894 hasConcept C159985019 @default.
- W1966977894 hasConcept C171250308 @default.
- W1966977894 hasConcept C178790620 @default.
- W1966977894 hasConcept C185592680 @default.
- W1966977894 hasConcept C19067145 @default.
- W1966977894 hasConcept C191897082 @default.
- W1966977894 hasConcept C192562407 @default.
- W1966977894 hasConcept C21036866 @default.
- W1966977894 hasConcept C2777289219 @default.
- W1966977894 hasConcept C2779227376 @default.
- W1966977894 hasConcept C2779559920 @default.
- W1966977894 hasConcept C2780901251 @default.
- W1966977894 hasConcept C39353612 @default.
- W1966977894 hasConcept C41895202 @default.
- W1966977894 hasConcept C44280652 @default.
- W1966977894 hasConcept C504270822 @default.
- W1966977894 hasConcept C56052488 @default.
- W1966977894 hasConcept C8010536 @default.
- W1966977894 hasConcept C97355855 @default.
- W1966977894 hasConceptScore W1966977894C111368507 @default.
- W1966977894 hasConceptScore W1966977894C121332964 @default.
- W1966977894 hasConceptScore W1966977894C126348684 @default.
- W1966977894 hasConceptScore W1966977894C127313418 @default.
- W1966977894 hasConceptScore W1966977894C138885662 @default.
- W1966977894 hasConceptScore W1966977894C159985019 @default.
- W1966977894 hasConceptScore W1966977894C171250308 @default.
- W1966977894 hasConceptScore W1966977894C178790620 @default.
- W1966977894 hasConceptScore W1966977894C185592680 @default.
- W1966977894 hasConceptScore W1966977894C19067145 @default.
- W1966977894 hasConceptScore W1966977894C191897082 @default.
- W1966977894 hasConceptScore W1966977894C192562407 @default.
- W1966977894 hasConceptScore W1966977894C21036866 @default.
- W1966977894 hasConceptScore W1966977894C2777289219 @default.
- W1966977894 hasConceptScore W1966977894C2779227376 @default.
- W1966977894 hasConceptScore W1966977894C2779559920 @default.
- W1966977894 hasConceptScore W1966977894C2780901251 @default.
- W1966977894 hasConceptScore W1966977894C39353612 @default.
- W1966977894 hasConceptScore W1966977894C41895202 @default.
- W1966977894 hasConceptScore W1966977894C44280652 @default.
- W1966977894 hasConceptScore W1966977894C504270822 @default.
- W1966977894 hasConceptScore W1966977894C56052488 @default.
- W1966977894 hasConceptScore W1966977894C8010536 @default.
- W1966977894 hasConceptScore W1966977894C97355855 @default.
- W1966977894 hasIssue "1R" @default.
- W1966977894 hasLocation W19669778941 @default.
- W1966977894 hasLocation W19669778942 @default.
- W1966977894 hasOpenAccess W1966977894 @default.
- W1966977894 hasPrimaryLocation W19669778941 @default.
- W1966977894 hasRelatedWork W1994408439 @default.
- W1966977894 hasRelatedWork W2032165769 @default.
- W1966977894 hasRelatedWork W2041596377 @default.
- W1966977894 hasRelatedWork W2276988595 @default.
- W1966977894 hasRelatedWork W2326383559 @default.
- W1966977894 hasRelatedWork W2382519800 @default.
- W1966977894 hasRelatedWork W2406982115 @default.
- W1966977894 hasRelatedWork W2473617154 @default.
- W1966977894 hasRelatedWork W2922991751 @default.
- W1966977894 hasRelatedWork W3111874403 @default.
- W1966977894 hasVolume "44" @default.
- W1966977894 isParatext "false" @default.
- W1966977894 isRetracted "false" @default.
- W1966977894 magId "1966977894" @default.
- W1966977894 workType "article" @default.