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- W1967058830 abstract "A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology." @default.
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- W1967058830 date "2002-01-01" @default.
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- W1967058830 title "Graded reflectivity micromirror arrays" @default.
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- W1967058830 doi "https://doi.org/10.1364/ao.41.000143" @default.
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