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• W1967086289 abstract "A direct method for nondamaging, nanometer-scale patterning of high Tc superconductor thin films is presented. We have fabricated superconducting nanobridges in high-quality, epitaxial thin-film YBa2Cu3O7 (YBCO) by combining direct-write electron beam lithography and an improved aqueous etchant. Weak links with both length and width dimensions less than 20 nm have exhibited critical currents at 77 K of 4–20 μA and IcRn products of 10–100 μV which compare favorably with results for other YBCO junction technologies. We have used this technique in the fabrication of a shock-wave pulse former as an initial demonstration of its applicability to monolithic superconductive electronics." @default.
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• W1967086289 date "1992-09-28" @default.
• W1967086289 modified "2023-10-16" @default.
• W1967086289 title "YBa2Cu3O7 nanobridges fabricated by direct-write electron beam lithography" @default.
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• W1967086289 doi "https://doi.org/10.1063/1.107508" @default.
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