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- W1967210870 abstract "In this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO2 nanofilm pattern on Si substrate. Experiment results within spectrum of 400–700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions ψ (x, y, λ) and Δ (x, y, λ) over the thin film pattern, the sampling times of ψ (x, y) and Δ (x, y) with 576 × 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO2 is about 0.2 nm and the lateral resolution is 60.9 μm × 24.6 μm in the parallel and perpendicular direction with respect to the incident plane." @default.
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- W1967210870 date "2011-02-01" @default.
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- W1967210870 title "Rotating compensator sampling for spectroscopic imaging ellipsometry" @default.
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- W1967210870 doi "https://doi.org/10.1016/j.tsf.2010.12.131" @default.
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