Matches in SemOpenAlex for { <https://semopenalex.org/work/W1967242341> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W1967242341 endingPage "2430" @default.
- W1967242341 startingPage "2428" @default.
- W1967242341 abstract "A brief review is presented on repetitively pulsed ‘‘Raduga 1–4’’ ion sources based on evaporation of the cathode material by vacuum arc. Their operation principles and functional possibilities are described. ‘‘Raduga-1,3’’ ion sources provide a formation of one component and multicomponent, not composition-controlled high intensity ion beams. Ion sources ‘‘Raduga-2,4’’ generate energy/composition-controlled multicomponent ion beams. Operation conditions of the sources providing a treatment of the details of complex shape as well as ion plasma treatment of the target are given. Features and prospects of the methods of repetitively pulsed multielement and high concentration implantation are discussed. The method of repetitively pulsed high concentration implantation is realized under ion/plasma operating conditions of the ion source ‘‘Raduga’’ and ion sputtering compensation of the target by plasma deposition." @default.
- W1967242341 created "2016-06-24" @default.
- W1967242341 creator A5016814586 @default.
- W1967242341 creator A5031518517 @default.
- W1967242341 date "1992-04-01" @default.
- W1967242341 modified "2023-09-24" @default.
- W1967242341 title "Sources and methods of repetitively pulsed ion/plasma material treatment" @default.
- W1967242341 cites W2012779175 @default.
- W1967242341 cites W2031519662 @default.
- W1967242341 cites W2068740387 @default.
- W1967242341 doi "https://doi.org/10.1063/1.1142900" @default.
- W1967242341 hasPublicationYear "1992" @default.
- W1967242341 type Work @default.
- W1967242341 sameAs 1967242341 @default.
- W1967242341 citedByCount "17" @default.
- W1967242341 countsByYear W19672423412012 @default.
- W1967242341 countsByYear W19672423412015 @default.
- W1967242341 countsByYear W19672423412016 @default.
- W1967242341 countsByYear W19672423412018 @default.
- W1967242341 countsByYear W19672423412019 @default.
- W1967242341 countsByYear W19672423412021 @default.
- W1967242341 countsByYear W19672423412022 @default.
- W1967242341 countsByYear W19672423412023 @default.
- W1967242341 crossrefType "journal-article" @default.
- W1967242341 hasAuthorship W1967242341A5016814586 @default.
- W1967242341 hasAuthorship W1967242341A5031518517 @default.
- W1967242341 hasConcept C121332964 @default.
- W1967242341 hasConcept C145148216 @default.
- W1967242341 hasConcept C147789679 @default.
- W1967242341 hasConcept C171250308 @default.
- W1967242341 hasConcept C178790620 @default.
- W1967242341 hasConcept C184779094 @default.
- W1967242341 hasConcept C185544564 @default.
- W1967242341 hasConcept C185592680 @default.
- W1967242341 hasConcept C188224857 @default.
- W1967242341 hasConcept C19067145 @default.
- W1967242341 hasConcept C192562407 @default.
- W1967242341 hasConcept C22423302 @default.
- W1967242341 hasConcept C44441586 @default.
- W1967242341 hasConcept C49110097 @default.
- W1967242341 hasConcept C61441594 @default.
- W1967242341 hasConcept C82706917 @default.
- W1967242341 hasConcept C97355855 @default.
- W1967242341 hasConceptScore W1967242341C121332964 @default.
- W1967242341 hasConceptScore W1967242341C145148216 @default.
- W1967242341 hasConceptScore W1967242341C147789679 @default.
- W1967242341 hasConceptScore W1967242341C171250308 @default.
- W1967242341 hasConceptScore W1967242341C178790620 @default.
- W1967242341 hasConceptScore W1967242341C184779094 @default.
- W1967242341 hasConceptScore W1967242341C185544564 @default.
- W1967242341 hasConceptScore W1967242341C185592680 @default.
- W1967242341 hasConceptScore W1967242341C188224857 @default.
- W1967242341 hasConceptScore W1967242341C19067145 @default.
- W1967242341 hasConceptScore W1967242341C192562407 @default.
- W1967242341 hasConceptScore W1967242341C22423302 @default.
- W1967242341 hasConceptScore W1967242341C44441586 @default.
- W1967242341 hasConceptScore W1967242341C49110097 @default.
- W1967242341 hasConceptScore W1967242341C61441594 @default.
- W1967242341 hasConceptScore W1967242341C82706917 @default.
- W1967242341 hasConceptScore W1967242341C97355855 @default.
- W1967242341 hasIssue "4" @default.
- W1967242341 hasLocation W19672423411 @default.
- W1967242341 hasOpenAccess W1967242341 @default.
- W1967242341 hasPrimaryLocation W19672423411 @default.
- W1967242341 hasRelatedWork W1617534506 @default.
- W1967242341 hasRelatedWork W1981954100 @default.
- W1967242341 hasRelatedWork W2012315347 @default.
- W1967242341 hasRelatedWork W2075988464 @default.
- W1967242341 hasRelatedWork W2091949762 @default.
- W1967242341 hasRelatedWork W2112187235 @default.
- W1967242341 hasRelatedWork W2144642093 @default.
- W1967242341 hasRelatedWork W3040943442 @default.
- W1967242341 hasRelatedWork W4362663149 @default.
- W1967242341 hasRelatedWork W2083108293 @default.
- W1967242341 hasVolume "63" @default.
- W1967242341 isParatext "false" @default.
- W1967242341 isRetracted "false" @default.
- W1967242341 magId "1967242341" @default.
- W1967242341 workType "article" @default.