Matches in SemOpenAlex for { <https://semopenalex.org/work/W1967294575> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W1967294575 abstract "A submersible lateral force sensor has been developed as part of an integrated MEMS chip for cell biomechanics experiments with forces below 100 nN. The piezoresistive elements in the sensor are defined by a single mask on an SOI wafer without the need for a doping or annealing step, and are easily integrated into other SOI MEMS. We examine the optimal design of this force sensor, as well as characterization results from fabricated devices." @default.
- W1967294575 created "2016-06-24" @default.
- W1967294575 creator A5040698516 @default.
- W1967294575 creator A5044322795 @default.
- W1967294575 creator A5044621631 @default.
- W1967294575 date "2011-06-01" @default.
- W1967294575 modified "2023-09-23" @default.
- W1967294575 title "A submersible piezoresistive MEMS lateral force sensor for cellular biomechanics applications" @default.
- W1967294575 cites W1970287347 @default.
- W1967294575 cites W2045522537 @default.
- W1967294575 cites W2086175318 @default.
- W1967294575 cites W2167827646 @default.
- W1967294575 cites W2266014939 @default.
- W1967294575 doi "https://doi.org/10.1109/transducers.2011.5969365" @default.
- W1967294575 hasPublicationYear "2011" @default.
- W1967294575 type Work @default.
- W1967294575 sameAs 1967294575 @default.
- W1967294575 citedByCount "1" @default.
- W1967294575 countsByYear W19672945752013 @default.
- W1967294575 crossrefType "proceedings-article" @default.
- W1967294575 hasAuthorship W1967294575A5040698516 @default.
- W1967294575 hasAuthorship W1967294575A5044322795 @default.
- W1967294575 hasAuthorship W1967294575A5044621631 @default.
- W1967294575 hasConcept C119599485 @default.
- W1967294575 hasConcept C121332964 @default.
- W1967294575 hasConcept C127413603 @default.
- W1967294575 hasConcept C160671074 @default.
- W1967294575 hasConcept C165005293 @default.
- W1967294575 hasConcept C170700871 @default.
- W1967294575 hasConcept C171250308 @default.
- W1967294575 hasConcept C192562407 @default.
- W1967294575 hasConcept C198490522 @default.
- W1967294575 hasConcept C24326235 @default.
- W1967294575 hasConcept C37977207 @default.
- W1967294575 hasConcept C49040817 @default.
- W1967294575 hasConcept C53143962 @default.
- W1967294575 hasConcept C544956773 @default.
- W1967294575 hasConcept C97355855 @default.
- W1967294575 hasConceptScore W1967294575C119599485 @default.
- W1967294575 hasConceptScore W1967294575C121332964 @default.
- W1967294575 hasConceptScore W1967294575C127413603 @default.
- W1967294575 hasConceptScore W1967294575C160671074 @default.
- W1967294575 hasConceptScore W1967294575C165005293 @default.
- W1967294575 hasConceptScore W1967294575C170700871 @default.
- W1967294575 hasConceptScore W1967294575C171250308 @default.
- W1967294575 hasConceptScore W1967294575C192562407 @default.
- W1967294575 hasConceptScore W1967294575C198490522 @default.
- W1967294575 hasConceptScore W1967294575C24326235 @default.
- W1967294575 hasConceptScore W1967294575C37977207 @default.
- W1967294575 hasConceptScore W1967294575C49040817 @default.
- W1967294575 hasConceptScore W1967294575C53143962 @default.
- W1967294575 hasConceptScore W1967294575C544956773 @default.
- W1967294575 hasConceptScore W1967294575C97355855 @default.
- W1967294575 hasLocation W19672945751 @default.
- W1967294575 hasOpenAccess W1967294575 @default.
- W1967294575 hasPrimaryLocation W19672945751 @default.
- W1967294575 hasRelatedWork W1510027701 @default.
- W1967294575 hasRelatedWork W1564395499 @default.
- W1967294575 hasRelatedWork W1607574423 @default.
- W1967294575 hasRelatedWork W1913017224 @default.
- W1967294575 hasRelatedWork W1997784885 @default.
- W1967294575 hasRelatedWork W2019479698 @default.
- W1967294575 hasRelatedWork W2029600153 @default.
- W1967294575 hasRelatedWork W2126803720 @default.
- W1967294575 hasRelatedWork W2157287781 @default.
- W1967294575 hasRelatedWork W2312794037 @default.
- W1967294575 hasRelatedWork W2326864911 @default.
- W1967294575 hasRelatedWork W2572040289 @default.
- W1967294575 hasRelatedWork W2587505700 @default.
- W1967294575 hasRelatedWork W2599227994 @default.
- W1967294575 hasRelatedWork W2613311186 @default.
- W1967294575 hasRelatedWork W2930395093 @default.
- W1967294575 hasRelatedWork W2948783074 @default.
- W1967294575 hasRelatedWork W3023588959 @default.
- W1967294575 hasRelatedWork W3214274426 @default.
- W1967294575 hasRelatedWork W2561074197 @default.
- W1967294575 isParatext "false" @default.
- W1967294575 isRetracted "false" @default.
- W1967294575 magId "1967294575" @default.
- W1967294575 workType "article" @default.