Matches in SemOpenAlex for { <https://semopenalex.org/work/W1967360525> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W1967360525 endingPage "H340" @default.
- W1967360525 startingPage "H340" @default.
- W1967360525 abstract "We investigate wet chemical etching of bare silicon wafers using a configuration where the wafer rotates and the etchant is supplied to the wafer by a nozzle positioned above the wafer center. The purpose of this study is to identify the change of the etch-rate profile on the wafer in relation to the parameters of speed of rotation, etchant flow rate, and etchant temperature. All of them influence the flow velocity of the etchant on the wafer. As a consequence, we propose to use a simplified model that captures the etchant flow velocity on the rotating wafer in sufficient detail to imply the etch-rate profiles for the wet-chemical-etching process of bare silicon wafers. We validate our approach against measured etch-rate profiles for a wide variety of parameter settings." @default.
- W1967360525 created "2016-06-24" @default.
- W1967360525 creator A5049326535 @default.
- W1967360525 creator A5057314138 @default.
- W1967360525 creator A5080612158 @default.
- W1967360525 date "2009-01-01" @default.
- W1967360525 modified "2023-09-23" @default.
- W1967360525 title "Analyses and Modeling of a Wet-Chemical-Etch Process on Rotating Silicon Wafers with an Impinging Etchant Jet" @default.
- W1967360525 cites W2035407704 @default.
- W1967360525 cites W2058857672 @default.
- W1967360525 cites W2077570073 @default.
- W1967360525 cites W2331716213 @default.
- W1967360525 cites W4239652282 @default.
- W1967360525 doi "https://doi.org/10.1149/1.3090176" @default.
- W1967360525 hasPublicationYear "2009" @default.
- W1967360525 type Work @default.
- W1967360525 sameAs 1967360525 @default.
- W1967360525 citedByCount "14" @default.
- W1967360525 countsByYear W19673605252012 @default.
- W1967360525 countsByYear W19673605252013 @default.
- W1967360525 countsByYear W19673605252015 @default.
- W1967360525 countsByYear W19673605252016 @default.
- W1967360525 countsByYear W19673605252021 @default.
- W1967360525 countsByYear W19673605252022 @default.
- W1967360525 countsByYear W19673605252023 @default.
- W1967360525 crossrefType "journal-article" @default.
- W1967360525 hasAuthorship W1967360525A5049326535 @default.
- W1967360525 hasAuthorship W1967360525A5057314138 @default.
- W1967360525 hasAuthorship W1967360525A5080612158 @default.
- W1967360525 hasConcept C100460472 @default.
- W1967360525 hasConcept C119947313 @default.
- W1967360525 hasConcept C121332964 @default.
- W1967360525 hasConcept C127413603 @default.
- W1967360525 hasConcept C159985019 @default.
- W1967360525 hasConcept C160671074 @default.
- W1967360525 hasConcept C172120300 @default.
- W1967360525 hasConcept C192562407 @default.
- W1967360525 hasConcept C2779227376 @default.
- W1967360525 hasConcept C33220542 @default.
- W1967360525 hasConcept C49040817 @default.
- W1967360525 hasConcept C544956773 @default.
- W1967360525 hasConcept C56200935 @default.
- W1967360525 hasConcept C57879066 @default.
- W1967360525 hasConcept C78519656 @default.
- W1967360525 hasConcept C81063470 @default.
- W1967360525 hasConceptScore W1967360525C100460472 @default.
- W1967360525 hasConceptScore W1967360525C119947313 @default.
- W1967360525 hasConceptScore W1967360525C121332964 @default.
- W1967360525 hasConceptScore W1967360525C127413603 @default.
- W1967360525 hasConceptScore W1967360525C159985019 @default.
- W1967360525 hasConceptScore W1967360525C160671074 @default.
- W1967360525 hasConceptScore W1967360525C172120300 @default.
- W1967360525 hasConceptScore W1967360525C192562407 @default.
- W1967360525 hasConceptScore W1967360525C2779227376 @default.
- W1967360525 hasConceptScore W1967360525C33220542 @default.
- W1967360525 hasConceptScore W1967360525C49040817 @default.
- W1967360525 hasConceptScore W1967360525C544956773 @default.
- W1967360525 hasConceptScore W1967360525C56200935 @default.
- W1967360525 hasConceptScore W1967360525C57879066 @default.
- W1967360525 hasConceptScore W1967360525C78519656 @default.
- W1967360525 hasConceptScore W1967360525C81063470 @default.
- W1967360525 hasIssue "5" @default.
- W1967360525 hasLocation W19673605251 @default.
- W1967360525 hasOpenAccess W1967360525 @default.
- W1967360525 hasPrimaryLocation W19673605251 @default.
- W1967360525 hasRelatedWork W1969379218 @default.
- W1967360525 hasRelatedWork W1980475310 @default.
- W1967360525 hasRelatedWork W2040990292 @default.
- W1967360525 hasRelatedWork W2064807885 @default.
- W1967360525 hasRelatedWork W2069180445 @default.
- W1967360525 hasRelatedWork W2612121378 @default.
- W1967360525 hasRelatedWork W2625607063 @default.
- W1967360525 hasRelatedWork W2903101056 @default.
- W1967360525 hasRelatedWork W3140386150 @default.
- W1967360525 hasRelatedWork W4381745617 @default.
- W1967360525 hasVolume "156" @default.
- W1967360525 isParatext "false" @default.
- W1967360525 isRetracted "false" @default.
- W1967360525 magId "1967360525" @default.
- W1967360525 workType "article" @default.