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- W1967491900 abstract "This paper demonstrates the feasibility of a novel fabrication approach of MEMS resonators above standard CMOS circuitry and with zero-level vacuum package. As a proof of concept a monolithical CMOS-MEMS-closed loop oscillator showing dual-clock capabilities (11.9 MHz and 24.5 MHz) is presented. These two frequencies correspond to two different resonator modes, specifically the torsional and vertical out of plane, of a paddle shaped MEMS resonator." @default.
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- W1967491900 date "2015-01-01" @default.
- W1967491900 modified "2023-10-01" @default.
- W1967491900 title "Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator" @default.
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- W1967491900 doi "https://doi.org/10.1109/memsys.2015.7051131" @default.
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