FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1967530224> ?p ?o ?g. }

• W1967530224 abstract "The PluTO project is aimed at combining thin-film and plasma technologies. Accordingly, the consortium comprises experts in optical coating (Laser Zentrum Hannover, Fraunhofer IOF) and such in plasma technology (INP Greifswald, Ruhr University of Bochum RUB). The process plasmas available, especially the sheath layers, will be thoroughly characterized by means of special probes, so that the types, numbers and energies of the particles participating in the coating formation processes can be determined comprehensively in every detail for the first time. The data thus obtained will provide a basis for a numerical modelling of layer growth at atomic scale (Bremen Center for Computational Materials Science BCCMS). The results are expected to deepen the understanding of the physical mechanisms responsible for the influence of plasma action on the layer properties. In parallel, suitable tools for process monitoring will be identified and made available. Some first results have already been achieved which prove the viability of the approach." @default.
• W1967530224 created "2016-06-24" @default.
• W1967530224 creator A5005523637 @default.
• W1967530224 creator A5011182372 @default.
• W1967530224 creator A5015810140 @default.
• W1967530224 creator A5023580518 @default.
• W1967530224 creator A5033437756 @default.
• W1967530224 creator A5041798794 @default.
• W1967530224 creator A5046336938 @default.
• W1967530224 creator A5051543838 @default.
• W1967530224 creator A5052144250 @default.
• W1967530224 creator A5055421825 @default.
• W1967530224 creator A5061030325 @default.
• W1967530224 creator A5069262079 @default.
• W1967530224 creator A5075408343 @default.
• W1967530224 creator A5076831062 @default.
• W1967530224 creator A5080118108 @default.
• W1967530224 creator A5084872475 @default.
• W1967530224 date "2011-09-22" @default.
• W1967530224 modified "2023-09-27" @default.
• W1967530224 title "Plasma and optical thin film technologies" @default.
• W1967530224 cites W1968254298 @default.
• W1967530224 cites W1968965587 @default.
• W1967530224 cites W1972298273 @default.
• W1967530224 cites W1978765653 @default.
• W1967530224 cites W1985833002 @default.
• W1967530224 cites W1988691097 @default.
• W1967530224 cites W2019594291 @default.
• W1967530224 cites W2022696619 @default.
• W1967530224 cites W2044774236 @default.
• W1967530224 cites W2046001409 @default.
• W1967530224 cites W2048483806 @default.
• W1967530224 cites W2060410316 @default.
• W1967530224 cites W2090545344 @default.
• W1967530224 cites W2134858354 @default.
• W1967530224 cites W2142890049 @default.
• W1967530224 cites W2180213849 @default.
• W1967530224 cites W2330702159 @default.
• W1967530224 cites W2993601878 @default.
• W1967530224 cites W2001000039 @default.
• W1967530224 doi "https://doi.org/10.1117/12.895323" @default.
• W1967530224 hasPublicationYear "2011" @default.
• W1967530224 type Work @default.
• W1967530224 sameAs 1967530224 @default.
• W1967530224 citedByCount "5" @default.
• W1967530224 countsByYear W19675302242013 @default.
• W1967530224 countsByYear W19675302242017 @default.
• W1967530224 countsByYear W19675302242020 @default.
• W1967530224 crossrefType "proceedings-article" @default.
• W1967530224 hasAuthorship W1967530224A5005523637 @default.
• W1967530224 hasAuthorship W1967530224A5011182372 @default.
• W1967530224 hasAuthorship W1967530224A5015810140 @default.
• W1967530224 hasAuthorship W1967530224A5023580518 @default.
• W1967530224 hasAuthorship W1967530224A5033437756 @default.
• W1967530224 hasAuthorship W1967530224A5041798794 @default.
• W1967530224 hasAuthorship W1967530224A5046336938 @default.
• W1967530224 hasAuthorship W1967530224A5051543838 @default.
• W1967530224 hasAuthorship W1967530224A5052144250 @default.
• W1967530224 hasAuthorship W1967530224A5055421825 @default.
• W1967530224 hasAuthorship W1967530224A5061030325 @default.
• W1967530224 hasAuthorship W1967530224A5069262079 @default.
• W1967530224 hasAuthorship W1967530224A5075408343 @default.
• W1967530224 hasAuthorship W1967530224A5076831062 @default.
• W1967530224 hasAuthorship W1967530224A5080118108 @default.
• W1967530224 hasAuthorship W1967530224A5084872475 @default.
• W1967530224 hasConcept C111919701 @default.
• W1967530224 hasConcept C120665830 @default.
• W1967530224 hasConcept C121332964 @default.
• W1967530224 hasConcept C127413603 @default.
• W1967530224 hasConcept C171250308 @default.
• W1967530224 hasConcept C19067145 @default.
• W1967530224 hasConcept C192562407 @default.
• W1967530224 hasConcept C2779227376 @default.
• W1967530224 hasConcept C2781448156 @default.
• W1967530224 hasConcept C41008148 @default.
• W1967530224 hasConcept C49040817 @default.
• W1967530224 hasConcept C520434653 @default.
• W1967530224 hasConcept C61696701 @default.
• W1967530224 hasConcept C62520636 @default.
• W1967530224 hasConcept C71597924 @default.
• W1967530224 hasConcept C82706917 @default.
• W1967530224 hasConcept C98045186 @default.
• W1967530224 hasConceptScore W1967530224C111919701 @default.
• W1967530224 hasConceptScore W1967530224C120665830 @default.
• W1967530224 hasConceptScore W1967530224C121332964 @default.
• W1967530224 hasConceptScore W1967530224C127413603 @default.
• W1967530224 hasConceptScore W1967530224C171250308 @default.
• W1967530224 hasConceptScore W1967530224C19067145 @default.
• W1967530224 hasConceptScore W1967530224C192562407 @default.
• W1967530224 hasConceptScore W1967530224C2779227376 @default.
• W1967530224 hasConceptScore W1967530224C2781448156 @default.
• W1967530224 hasConceptScore W1967530224C41008148 @default.
• W1967530224 hasConceptScore W1967530224C49040817 @default.
• W1967530224 hasConceptScore W1967530224C520434653 @default.
• W1967530224 hasConceptScore W1967530224C61696701 @default.
• W1967530224 hasConceptScore W1967530224C62520636 @default.
• W1967530224 hasConceptScore W1967530224C71597924 @default.
• W1967530224 hasConceptScore W1967530224C82706917 @default.
• W1967530224 hasConceptScore W1967530224C98045186 @default.
• W1967530224 hasLocation W19675302241 @default.

• next