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• W1967569398 abstract "A model combining multiple layer description and effective media approximation is developed for pyrometry in the case of thin film synthesis, in order to estimate the film property evolution along its thickness during the growth process in real time. The model is used to investigate optical properties of polycrystalline diamond film prepared by H2∕CH4∕N2 microwave plasma. It is shown that in the presence of nitrogen, the growth is strongly nonhomogeneous. The deposit, initially composed of large amounts of void and nondiamond phases, evolves rapidly towards highest quality dense film where the diamond phase is predominant." @default.
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• W1967569398 date "2007-03-26" @default.
• W1967569398 modified "2023-09-30" @default.
• W1967569398 title "Real-time optical monitoring of thin film growth by<i>in situ</i>pyrometry through multiple layers and effective media approximation modeling" @default.
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• W1967569398 doi "https://doi.org/10.1063/1.2717558" @default.
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