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- W1967607071 abstract "본 연구에서는, Ni/CNT/<TEX>$SiO_2$</TEX> 구조의 4H-SiC MIS 캐패시터를 제작하고 전기적 특성을 조사하였다. 이를 통하여 4H-SiC MIS 소자에서 탄소나노튜브의 역할을 분석하고자 하였다. 탄소나노튜브는 이소프로필알코올과 혼합하여 <TEX>$SiO_2$</TEX> 표면에 분산하였다. 소자의 전기적 특성 분석을 위하여 300-500K의 온도 범위에서 소자의 정전용량-전압 특성을 측정하였다. 밴드 평탄화 전압은 양의 방향으로 shift되었다. 정전용량-전압 그래프로부터 계면 포획 전하 밀도 및 산화막 포획 전하 밀도가 유도되었다. 산화막의 상태는 4H-SiC MIS 구조의 계면에서 전하 반송자 또는 결함 상태와 관련된다. 온도가 증가함에 따라 밴드 평탄화 전압은 음의 방향으로 shift되는 결과를 얻었다. 실험 결과로부터, Ni과 <TEX>$SiO_2$</TEX> 계면에 탄소나노튜브를 첨가함에 따라 4H-SiC MIS 캐패시터의 게이트 특성을 조절 가능할 것으로 판단된다. In this study, the electrical characteristics of Ni/CNT/<TEX>$SiO_2$</TEX> structures were investigated in order to analyze the mechanism of carbon nanotubes in 4H-SiC MIS device structures. We fabricated 4H-SiC MIS capacitors with or without carbon nanotubes. Carbon nanotubes were dispersed by isopropyl alcohol. The capacitance-voltage (C-V) is characterized at 300 to 500K. The experimental flat-band voltage (<TEX>$V_{FB}$</TEX>) shift was positive. Near-interface trapped charge density and oxide trapped charge density values of Ni/CNT/<TEX>$SiO_2$</TEX> structure were less than values of reference samples. With increasing temperature, the flat-band voltage was negative. It has been found that its oxide quality is related to charge carriers or defect states in the interface of 4H-SiC MIS capacitors. Gate characteristics of 4H-SiC MIS capacitors can be controlled by carbon nanotubes between Ni and <TEX>$SiO_2$</TEX>." @default.
- W1967607071 created "2016-06-24" @default.
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- W1967607071 date "2014-12-31" @default.
- W1967607071 modified "2023-10-17" @default.
- W1967607071 title "Electrical characteristics of 4H-SiC MIS Capacitors With Ni/CNT/SiO2 Structure" @default.
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- W1967607071 doi "https://doi.org/10.7471/ikeee.2014.18.4.620" @default.
- W1967607071 hasPublicationYear "2014" @default.
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