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- W1967657689 abstract "Spatiotemporally resolved observation of optical emission spectra was made in 1 MHz discharges in CF 4 and in CF 4 /N 2 mixture at the pressure of 0.5 Torr. The emission intensity peaks around phases ω t =0 and π of the applied voltage ( V sin ω t ) were observed in addition to those around phases ω t =π/2 and 3π/2. These results are similar to those in electronegative SF 6 /N 2 mixture discharges, while their electrical properties are rather similar to those in electropositive N 2 discharges. Those characteristic optical emissions indicate the existence of a relatively intense field due to the space charge which is yielded by the presence of negative ions in the discharge space." @default.
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- W1967657689 date "1994-07-01" @default.
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- W1967657689 title "Spatiotemporal Profiles of Optical Emission Spectra in CF<sub>4</sub> Discharges at 1 MHz" @default.
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- W1967657689 doi "https://doi.org/10.1143/jjap.33.4340" @default.
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