Matches in SemOpenAlex for { <https://semopenalex.org/work/W1967717966> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W1967717966 endingPage "277" @default.
- W1967717966 startingPage "272" @default.
- W1967717966 abstract "This paper deals with the study of the role of gas temperature and of the ratio of r.f. power to gas flow on the particle’s formation in amorphous silicon films grown by the plasma enhanced chemical vapour deposition technique, by monitoring the plasma impedance behaviour under different process conditions. The results achieved show the existence of two main boundary regions separating the so-called α-regime (no powder formed) from the γ-regime (powder formed). Those regions are reached either by heating the gas, changing the gas pressure or using high power to gas flow ratios, corresponding to the establishment of a balance between the plasma resistance and the plasma reactance. In the β-region the probability to incorporate nanoparticles in the films is low and the films exhibit photosensitivity’s of about 105 with density of states determined by the constant photocurrent method below 6×1015 cm−3 with Urbach energies below 50 meV. In the θ-region small nanoparticles can be incorporated leading to films with density of states below 3×1015 cm−3, with Urbach energies above 50 meV and photosensitivity’s above 106, about two orders of magnitude larger than that of conventional amorphous silicon grown in the α-regime." @default.
- W1967717966 created "2016-06-24" @default.
- W1967717966 creator A5022572035 @default.
- W1967717966 creator A5025162982 @default.
- W1967717966 creator A5079572183 @default.
- W1967717966 creator A5088870986 @default.
- W1967717966 creator A5090523040 @default.
- W1967717966 date "2000-01-01" @default.
- W1967717966 modified "2023-09-27" @default.
- W1967717966 title "Role of the gas temperature and power to gas flow ratio on powder formation and properties of films grown by the PECVD technique" @default.
- W1967717966 cites W1999802258 @default.
- W1967717966 cites W2013020095 @default.
- W1967717966 cites W2055559053 @default.
- W1967717966 cites W2068194627 @default.
- W1967717966 cites W2080253860 @default.
- W1967717966 cites W2085975302 @default.
- W1967717966 cites W2088558188 @default.
- W1967717966 cites W2151454484 @default.
- W1967717966 doi "https://doi.org/10.1016/s0921-5107(99)00307-4" @default.
- W1967717966 hasPublicationYear "2000" @default.
- W1967717966 type Work @default.
- W1967717966 sameAs 1967717966 @default.
- W1967717966 citedByCount "6" @default.
- W1967717966 countsByYear W19677179662012 @default.
- W1967717966 countsByYear W19677179662022 @default.
- W1967717966 crossrefType "journal-article" @default.
- W1967717966 hasAuthorship W1967717966A5022572035 @default.
- W1967717966 hasAuthorship W1967717966A5025162982 @default.
- W1967717966 hasAuthorship W1967717966A5079572183 @default.
- W1967717966 hasAuthorship W1967717966A5088870986 @default.
- W1967717966 hasAuthorship W1967717966A5090523040 @default.
- W1967717966 hasConcept C113196181 @default.
- W1967717966 hasConcept C121332964 @default.
- W1967717966 hasConcept C171250308 @default.
- W1967717966 hasConcept C178790620 @default.
- W1967717966 hasConcept C185592680 @default.
- W1967717966 hasConcept C186807665 @default.
- W1967717966 hasConcept C192562407 @default.
- W1967717966 hasConcept C201999631 @default.
- W1967717966 hasConcept C2776390347 @default.
- W1967717966 hasConcept C2779667780 @default.
- W1967717966 hasConcept C2779845233 @default.
- W1967717966 hasConcept C38347018 @default.
- W1967717966 hasConcept C49040817 @default.
- W1967717966 hasConcept C544956773 @default.
- W1967717966 hasConcept C56052488 @default.
- W1967717966 hasConcept C57410435 @default.
- W1967717966 hasConcept C62520636 @default.
- W1967717966 hasConcept C8010536 @default.
- W1967717966 hasConcept C82706917 @default.
- W1967717966 hasConceptScore W1967717966C113196181 @default.
- W1967717966 hasConceptScore W1967717966C121332964 @default.
- W1967717966 hasConceptScore W1967717966C171250308 @default.
- W1967717966 hasConceptScore W1967717966C178790620 @default.
- W1967717966 hasConceptScore W1967717966C185592680 @default.
- W1967717966 hasConceptScore W1967717966C186807665 @default.
- W1967717966 hasConceptScore W1967717966C192562407 @default.
- W1967717966 hasConceptScore W1967717966C201999631 @default.
- W1967717966 hasConceptScore W1967717966C2776390347 @default.
- W1967717966 hasConceptScore W1967717966C2779667780 @default.
- W1967717966 hasConceptScore W1967717966C2779845233 @default.
- W1967717966 hasConceptScore W1967717966C38347018 @default.
- W1967717966 hasConceptScore W1967717966C49040817 @default.
- W1967717966 hasConceptScore W1967717966C544956773 @default.
- W1967717966 hasConceptScore W1967717966C56052488 @default.
- W1967717966 hasConceptScore W1967717966C57410435 @default.
- W1967717966 hasConceptScore W1967717966C62520636 @default.
- W1967717966 hasConceptScore W1967717966C8010536 @default.
- W1967717966 hasConceptScore W1967717966C82706917 @default.
- W1967717966 hasLocation W19677179661 @default.
- W1967717966 hasOpenAccess W1967717966 @default.
- W1967717966 hasPrimaryLocation W19677179661 @default.
- W1967717966 hasRelatedWork W1988946979 @default.
- W1967717966 hasRelatedWork W2004961340 @default.
- W1967717966 hasRelatedWork W2006777557 @default.
- W1967717966 hasRelatedWork W2007826678 @default.
- W1967717966 hasRelatedWork W2033869131 @default.
- W1967717966 hasRelatedWork W2036967377 @default.
- W1967717966 hasRelatedWork W2042925503 @default.
- W1967717966 hasRelatedWork W2052330921 @default.
- W1967717966 hasRelatedWork W2057316334 @default.
- W1967717966 hasRelatedWork W800018353 @default.
- W1967717966 hasVolume "69-70" @default.
- W1967717966 isParatext "false" @default.
- W1967717966 isRetracted "false" @default.
- W1967717966 magId "1967717966" @default.
- W1967717966 workType "article" @default.