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- W1967740356 abstract "A relatively simple experimental method to estimate a diffusivity of silicon interstitials is described. In the low-temperature range between 460 and 500 °C, oxygen thermal donors are used as a monitor for silicon interstitials. The estimated diffusivity of silicon interstitials at oxygen-donor-formation temperatures is fitted to previously-published results from oxidation-enhanced and retarded-diffusion experiments at temperatures above 950 °C. In the temperature range between 460 and 1200 °C, the diffusivity of silicon interstitials is described by the Arrhenius equation, Di=3.35×10−1 exp(−1.86/kT) cm2/s." @default.
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- W1967740356 date "1990-06-15" @default.
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- W1967740356 title "An experimental estimation of silicon interstitial diffusivity" @default.
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- W1967740356 doi "https://doi.org/10.1063/1.345806" @default.
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