Matches in SemOpenAlex for { <https://semopenalex.org/work/W1967756670> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1967756670 endingPage "3077" @default.
- W1967756670 startingPage "3072" @default.
- W1967756670 abstract "Electron projection lithography (EPL) is one of the leading candidates for next-generation lithography at the 65 nm lithography node, particularly for contact levels. This article describes the results of an experimental effort to benchmark the current state of EPL stencil mask making. In this article, we report on the current status of the data handling software needed to pattern an EPL stencil reticle, EPL stencil reticle repair techniques, and EPL stencil mask stability following prolonged electron-beam irradiation." @default.
- W1967756670 created "2016-06-24" @default.
- W1967756670 creator A5003641042 @default.
- W1967756670 creator A5005630467 @default.
- W1967756670 creator A5020149181 @default.
- W1967756670 creator A5062015076 @default.
- W1967756670 creator A5068980740 @default.
- W1967756670 creator A5075443532 @default.
- W1967756670 creator A5078334745 @default.
- W1967756670 creator A5086474345 @default.
- W1967756670 creator A5089691942 @default.
- W1967756670 date "2003-11-01" @default.
- W1967756670 modified "2023-09-27" @default.
- W1967756670 title "Benchmarking stencil reticles for electron projection lithography" @default.
- W1967756670 cites W1963936597 @default.
- W1967756670 cites W1976571780 @default.
- W1967756670 cites W1981352299 @default.
- W1967756670 cites W1986179782 @default.
- W1967756670 cites W1988174058 @default.
- W1967756670 cites W2070480793 @default.
- W1967756670 cites W2076012956 @default.
- W1967756670 cites W2053372219 @default.
- W1967756670 doi "https://doi.org/10.1116/1.1624263" @default.
- W1967756670 hasPublicationYear "2003" @default.
- W1967756670 type Work @default.
- W1967756670 sameAs 1967756670 @default.
- W1967756670 citedByCount "0" @default.
- W1967756670 crossrefType "journal-article" @default.
- W1967756670 hasAuthorship W1967756670A5003641042 @default.
- W1967756670 hasAuthorship W1967756670A5005630467 @default.
- W1967756670 hasAuthorship W1967756670A5020149181 @default.
- W1967756670 hasAuthorship W1967756670A5062015076 @default.
- W1967756670 hasAuthorship W1967756670A5068980740 @default.
- W1967756670 hasAuthorship W1967756670A5075443532 @default.
- W1967756670 hasAuthorship W1967756670A5078334745 @default.
- W1967756670 hasAuthorship W1967756670A5086474345 @default.
- W1967756670 hasAuthorship W1967756670A5089691942 @default.
- W1967756670 hasConcept C120665830 @default.
- W1967756670 hasConcept C121332964 @default.
- W1967756670 hasConcept C146617872 @default.
- W1967756670 hasConcept C160671074 @default.
- W1967756670 hasConcept C171250308 @default.
- W1967756670 hasConcept C192562407 @default.
- W1967756670 hasConcept C200274948 @default.
- W1967756670 hasConcept C204223013 @default.
- W1967756670 hasConcept C2779227376 @default.
- W1967756670 hasConcept C41008148 @default.
- W1967756670 hasConcept C459310 @default.
- W1967756670 hasConcept C49040817 @default.
- W1967756670 hasConcept C53524968 @default.
- W1967756670 hasConcept C70520399 @default.
- W1967756670 hasConcept C76752949 @default.
- W1967756670 hasConceptScore W1967756670C120665830 @default.
- W1967756670 hasConceptScore W1967756670C121332964 @default.
- W1967756670 hasConceptScore W1967756670C146617872 @default.
- W1967756670 hasConceptScore W1967756670C160671074 @default.
- W1967756670 hasConceptScore W1967756670C171250308 @default.
- W1967756670 hasConceptScore W1967756670C192562407 @default.
- W1967756670 hasConceptScore W1967756670C200274948 @default.
- W1967756670 hasConceptScore W1967756670C204223013 @default.
- W1967756670 hasConceptScore W1967756670C2779227376 @default.
- W1967756670 hasConceptScore W1967756670C41008148 @default.
- W1967756670 hasConceptScore W1967756670C459310 @default.
- W1967756670 hasConceptScore W1967756670C49040817 @default.
- W1967756670 hasConceptScore W1967756670C53524968 @default.
- W1967756670 hasConceptScore W1967756670C70520399 @default.
- W1967756670 hasConceptScore W1967756670C76752949 @default.
- W1967756670 hasIssue "6" @default.
- W1967756670 hasLocation W19677566701 @default.
- W1967756670 hasOpenAccess W1967756670 @default.
- W1967756670 hasPrimaryLocation W19677566701 @default.
- W1967756670 hasRelatedWork W1963931461 @default.
- W1967756670 hasRelatedWork W1967756670 @default.
- W1967756670 hasRelatedWork W2006908376 @default.
- W1967756670 hasRelatedWork W2016414238 @default.
- W1967756670 hasRelatedWork W2030781314 @default.
- W1967756670 hasRelatedWork W2036697329 @default.
- W1967756670 hasRelatedWork W2055358794 @default.
- W1967756670 hasRelatedWork W2070135291 @default.
- W1967756670 hasRelatedWork W2088103355 @default.
- W1967756670 hasRelatedWork W2942073039 @default.
- W1967756670 hasVolume "21" @default.
- W1967756670 isParatext "false" @default.
- W1967756670 isRetracted "false" @default.
- W1967756670 magId "1967756670" @default.
- W1967756670 workType "article" @default.