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• W1967772015 abstract "In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot location and the cantilever properties. This phase lag is theoretically predicted and experimentally verified. Combined with thermo-mechanical properties of the cantilever and its geometry, the location of the laser spot, the thermal diffusivity, and the layer thicknesses of the cantilever can be extracted." @default.
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• W1967772015 date "2014-08-18" @default.
• W1967772015 modified "2023-09-27" @default.
• W1967772015 title "Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization" @default.
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• W1967772015 doi "https://doi.org/10.1063/1.4893461" @default.
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