FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968008636> ?p ?o ?g. }

• W1968008636 endingPage "2089" @default.
• W1968008636 startingPage "2089" @default.
• W1968008636 abstract "Gate electrode etching using a transformer coupled plasma (TCP) was studied for future device fabrication. The influence of chamber hardware configuration on plasma characteristics and etching performance has been studied for polysilicon and polycide etching. It has been found that etching and plasma uniformities greatly depend upon dielectric plate shape and position of the inductive coil on the dielectric plate, and that distance between the inductive coil and the dielectric plate has a big impact on the etching performance. This impact on the etching performance is caused by changing the capacitively coupled component in the inductively coupled plasma." @default.
• W1968008636 created "2016-06-24" @default.
• W1968008636 creator A5005604397 @default.
• W1968008636 creator A5013252750 @default.
• W1968008636 creator A5026131646 @default.
• W1968008636 creator A5071008254 @default.
• W1968008636 date "1995-04-01" @default.
• W1968008636 modified "2023-09-28" @default.
• W1968008636 title "Gate Electrode Etching Using a Transformer Coupled Plasma" @default.
• W1968008636 cites W1967079143 @default.
• W1968008636 cites W1969069387 @default.
• W1968008636 cites W2003230207 @default.
• W1968008636 cites W2008225124 @default.
• W1968008636 cites W2026982365 @default.
• W1968008636 cites W2032247708 @default.
• W1968008636 cites W2049967940 @default.
• W1968008636 cites W2054448690 @default.
• W1968008636 cites W2066044088 @default.
• W1968008636 cites W2116666365 @default.
• W1968008636 doi "https://doi.org/10.1143/jjap.34.2089" @default.
• W1968008636 hasPublicationYear "1995" @default.
• W1968008636 type Work @default.
• W1968008636 sameAs 1968008636 @default.
• W1968008636 citedByCount "15" @default.
• W1968008636 countsByYear W19680086362019 @default.
• W1968008636 countsByYear W19680086362020 @default.
• W1968008636 countsByYear W19680086362022 @default.
• W1968008636 crossrefType "journal-article" @default.
• W1968008636 hasAuthorship W1968008636A5005604397 @default.
• W1968008636 hasAuthorship W1968008636A5013252750 @default.
• W1968008636 hasAuthorship W1968008636A5026131646 @default.
• W1968008636 hasAuthorship W1968008636A5071008254 @default.
• W1968008636 hasConcept C100460472 @default.
• W1968008636 hasConcept C107187091 @default.
• W1968008636 hasConcept C119599485 @default.
• W1968008636 hasConcept C121332964 @default.
• W1968008636 hasConcept C127413603 @default.
• W1968008636 hasConcept C130472188 @default.
• W1968008636 hasConcept C133386390 @default.
• W1968008636 hasConcept C136525101 @default.
• W1968008636 hasConcept C142724271 @default.
• W1968008636 hasConcept C145738678 @default.
• W1968008636 hasConcept C147789679 @default.
• W1968008636 hasConcept C165801399 @default.
• W1968008636 hasConcept C171250308 @default.
• W1968008636 hasConcept C17525397 @default.
• W1968008636 hasConcept C185592680 @default.
• W1968008636 hasConcept C192562407 @default.
• W1968008636 hasConcept C204787440 @default.
• W1968008636 hasConcept C2779227376 @default.
• W1968008636 hasConcept C30403606 @default.
• W1968008636 hasConcept C49040817 @default.
• W1968008636 hasConcept C62520636 @default.
• W1968008636 hasConcept C66322947 @default.
• W1968008636 hasConcept C68687820 @default.
• W1968008636 hasConcept C71924100 @default.
• W1968008636 hasConcept C82706917 @default.
• W1968008636 hasConcept C95974651 @default.
• W1968008636 hasConceptScore W1968008636C100460472 @default.
• W1968008636 hasConceptScore W1968008636C107187091 @default.
• W1968008636 hasConceptScore W1968008636C119599485 @default.
• W1968008636 hasConceptScore W1968008636C121332964 @default.
• W1968008636 hasConceptScore W1968008636C127413603 @default.
• W1968008636 hasConceptScore W1968008636C130472188 @default.
• W1968008636 hasConceptScore W1968008636C133386390 @default.
• W1968008636 hasConceptScore W1968008636C136525101 @default.
• W1968008636 hasConceptScore W1968008636C142724271 @default.
• W1968008636 hasConceptScore W1968008636C145738678 @default.
• W1968008636 hasConceptScore W1968008636C147789679 @default.
• W1968008636 hasConceptScore W1968008636C165801399 @default.
• W1968008636 hasConceptScore W1968008636C171250308 @default.
• W1968008636 hasConceptScore W1968008636C17525397 @default.
• W1968008636 hasConceptScore W1968008636C185592680 @default.
• W1968008636 hasConceptScore W1968008636C192562407 @default.
• W1968008636 hasConceptScore W1968008636C204787440 @default.
• W1968008636 hasConceptScore W1968008636C2779227376 @default.
• W1968008636 hasConceptScore W1968008636C30403606 @default.
• W1968008636 hasConceptScore W1968008636C49040817 @default.
• W1968008636 hasConceptScore W1968008636C62520636 @default.
• W1968008636 hasConceptScore W1968008636C66322947 @default.
• W1968008636 hasConceptScore W1968008636C68687820 @default.
• W1968008636 hasConceptScore W1968008636C71924100 @default.
• W1968008636 hasConceptScore W1968008636C82706917 @default.
• W1968008636 hasConceptScore W1968008636C95974651 @default.
• W1968008636 hasIssue "4S" @default.
• W1968008636 hasLocation W19680086361 @default.
• W1968008636 hasOpenAccess W1968008636 @default.
• W1968008636 hasPrimaryLocation W19680086361 @default.
• W1968008636 hasRelatedWork W1544774047 @default.
• W1968008636 hasRelatedWork W1968008636 @default.
• W1968008636 hasRelatedWork W2010599959 @default.
• W1968008636 hasRelatedWork W2031201399 @default.
• W1968008636 hasRelatedWork W2059112004 @default.
• W1968008636 hasRelatedWork W2167011693 @default.
• W1968008636 hasRelatedWork W2385387985 @default.
• W1968008636 hasRelatedWork W3197419717 @default.
• W1968008636 hasRelatedWork W4230536903 @default.
• W1968008636 hasRelatedWork W820049253 @default.

• next