FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968045358> ?p ?o ?g. }

• W1968045358 endingPage "605" @default.
• W1968045358 startingPage "602" @default.
• W1968045358 abstract "The characteristics of a low pressure radio frequency (rf) magnetron argon plasma with varying hydrogen flow rate have been investigated using a Langmuir probe and optical emission spectroscopy. Plasma measurements have been taken for conditions involving a silicon target to complement a previous study on the growth process and the effect of varying hydrogen flow rate on the deposition rate and hydrogen content of amorphous silicon films. This previous study indicated a sudden increase in the deposition rate when hydrogen is introduced into the argon discharge, and was attributed to an assumed increase in ion density (not measured). However, our current Langmuir probe studies show that the ion density decreases with the addition of hydrogen. It is now proposed that the increased deposition rate is due to the presence of hydrogen, which facilitates the uptake of silicon. Langmuir results on the effect of rf power show that the ion density does increase with increasing power which is consistent with the prior work." @default.
• W1968045358 created "2016-06-24" @default.
• W1968045358 creator A5028098400 @default.
• W1968045358 creator A5030324459 @default.
• W1968045358 creator A5040482426 @default.
• W1968045358 creator A5046456015 @default.
• W1968045358 creator A5086442629 @default.
• W1968045358 date "2008-12-01" @default.
• W1968045358 modified "2023-09-24" @default.
• W1968045358 title "Langmuir probe and optical emission studies in a radio frequency (rf) magnetron plasma used for the deposition of hydrogenated amorphous silicon" @default.
• W1968045358 cites W1677260163 @default.
• W1968045358 cites W2004127326 @default.
• W1968045358 cites W2006124169 @default.
• W1968045358 cites W2010377272 @default.
• W1968045358 cites W2020610139 @default.
• W1968045358 cites W2029982808 @default.
• W1968045358 cites W2030759405 @default.
• W1968045358 cites W2032414599 @default.
• W1968045358 cites W2047438302 @default.
• W1968045358 cites W2059992137 @default.
• W1968045358 cites W2060099987 @default.
• W1968045358 cites W2070658476 @default.
• W1968045358 cites W2071974251 @default.
• W1968045358 cites W2074252930 @default.
• W1968045358 cites W2083479783 @default.
• W1968045358 cites W2091526376 @default.
• W1968045358 cites W2094781014 @default.
• W1968045358 cites W2096277584 @default.
• W1968045358 cites W2126706485 @default.
• W1968045358 cites W2169473587 @default.
• W1968045358 cites W4236641648 @default.
• W1968045358 doi "https://doi.org/10.1016/j.surfcoat.2008.05.014" @default.
• W1968045358 hasPublicationYear "2008" @default.
• W1968045358 type Work @default.
• W1968045358 sameAs 1968045358 @default.
• W1968045358 citedByCount "12" @default.
• W1968045358 countsByYear W19680453582012 @default.
• W1968045358 countsByYear W19680453582015 @default.
• W1968045358 countsByYear W19680453582016 @default.
• W1968045358 countsByYear W19680453582018 @default.
• W1968045358 countsByYear W19680453582019 @default.
• W1968045358 countsByYear W19680453582020 @default.
• W1968045358 countsByYear W19680453582023 @default.
• W1968045358 crossrefType "journal-article" @default.
• W1968045358 hasAuthorship W1968045358A5028098400 @default.
• W1968045358 hasAuthorship W1968045358A5030324459 @default.
• W1968045358 hasAuthorship W1968045358A5040482426 @default.
• W1968045358 hasAuthorship W1968045358A5046456015 @default.
• W1968045358 hasAuthorship W1968045358A5086442629 @default.
• W1968045358 hasConcept C113196181 @default.
• W1968045358 hasConcept C121332964 @default.
• W1968045358 hasConcept C123408415 @default.
• W1968045358 hasConcept C151730666 @default.
• W1968045358 hasConcept C171250308 @default.
• W1968045358 hasConcept C176118016 @default.
• W1968045358 hasConcept C178790620 @default.
• W1968045358 hasConcept C184779094 @default.
• W1968045358 hasConcept C185592680 @default.
• W1968045358 hasConcept C19067145 @default.
• W1968045358 hasConcept C192562407 @default.
• W1968045358 hasConcept C22423302 @default.
• W1968045358 hasConcept C2776390347 @default.
• W1968045358 hasConcept C2779667780 @default.
• W1968045358 hasConcept C2816523 @default.
• W1968045358 hasConcept C43503373 @default.
• W1968045358 hasConcept C43617362 @default.
• W1968045358 hasConcept C49040817 @default.
• W1968045358 hasConcept C512968161 @default.
• W1968045358 hasConcept C544956773 @default.
• W1968045358 hasConcept C547737533 @default.
• W1968045358 hasConcept C56052488 @default.
• W1968045358 hasConcept C61427134 @default.
• W1968045358 hasConcept C62520636 @default.
• W1968045358 hasConcept C64297162 @default.
• W1968045358 hasConcept C82706917 @default.
• W1968045358 hasConcept C86803240 @default.
• W1968045358 hasConceptScore W1968045358C113196181 @default.
• W1968045358 hasConceptScore W1968045358C121332964 @default.
• W1968045358 hasConceptScore W1968045358C123408415 @default.
• W1968045358 hasConceptScore W1968045358C151730666 @default.
• W1968045358 hasConceptScore W1968045358C171250308 @default.
• W1968045358 hasConceptScore W1968045358C176118016 @default.
• W1968045358 hasConceptScore W1968045358C178790620 @default.
• W1968045358 hasConceptScore W1968045358C184779094 @default.
• W1968045358 hasConceptScore W1968045358C185592680 @default.
• W1968045358 hasConceptScore W1968045358C19067145 @default.
• W1968045358 hasConceptScore W1968045358C192562407 @default.
• W1968045358 hasConceptScore W1968045358C22423302 @default.
• W1968045358 hasConceptScore W1968045358C2776390347 @default.
• W1968045358 hasConceptScore W1968045358C2779667780 @default.
• W1968045358 hasConceptScore W1968045358C2816523 @default.
• W1968045358 hasConceptScore W1968045358C43503373 @default.
• W1968045358 hasConceptScore W1968045358C43617362 @default.
• W1968045358 hasConceptScore W1968045358C49040817 @default.
• W1968045358 hasConceptScore W1968045358C512968161 @default.
• W1968045358 hasConceptScore W1968045358C544956773 @default.
• W1968045358 hasConceptScore W1968045358C547737533 @default.
• W1968045358 hasConceptScore W1968045358C56052488 @default.

• next