FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968049559> ?p ?o ?g. }

• W1968049559 abstract "In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently the Secondary Electron Asymmetry Effect (SEAE) was discovered (T. Lafleur, P. Chabert and J.P. Booth, J. Phys. D: Appl. Phys. 46 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e. a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find, that the superposition of the EAE and the SEAE is non-linear, i.e. the asymmetries generated by each individual effect do not simply add up. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined." @default.
• W1968049559 created "2016-06-24" @default.
• W1968049559 creator A5010518216 @default.
• W1968049559 creator A5030507867 @default.
• W1968049559 creator A5069885304 @default.
• W1968049559 creator A5075161205 @default.
• W1968049559 date "2013-08-05" @default.
• W1968049559 modified "2023-10-18" @default.
• W1968049559 title "The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas" @default.
• W1968049559 cites W1967510748 @default.
• W1968049559 cites W1985668078 @default.
• W1968049559 cites W1996016748 @default.
• W1968049559 cites W1996957017 @default.
• W1968049559 cites W2000172671 @default.
• W1968049559 cites W2008446823 @default.
• W1968049559 cites W2008464274 @default.
• W1968049559 cites W2009659030 @default.
• W1968049559 cites W2010839848 @default.
• W1968049559 cites W2012597707 @default.
• W1968049559 cites W2017981825 @default.
• W1968049559 cites W2020045108 @default.
• W1968049559 cites W2026615058 @default.
• W1968049559 cites W2028382665 @default.
• W1968049559 cites W2030223669 @default.
• W1968049559 cites W2031688765 @default.
• W1968049559 cites W2035060057 @default.
• W1968049559 cites W2040464194 @default.
• W1968049559 cites W2044798880 @default.
• W1968049559 cites W2046193750 @default.
• W1968049559 cites W2066064095 @default.
• W1968049559 cites W2080461130 @default.
• W1968049559 cites W2083243597 @default.
• W1968049559 cites W2089864237 @default.
• W1968049559 cites W2102337165 @default.
• W1968049559 cites W2104062774 @default.
• W1968049559 cites W2123761964 @default.
• W1968049559 cites W2128686018 @default.
• W1968049559 cites W2147018641 @default.
• W1968049559 cites W2150759874 @default.
• W1968049559 cites W2151160326 @default.
• W1968049559 cites W2162999431 @default.
• W1968049559 cites W2165215367 @default.
• W1968049559 doi "https://doi.org/10.1063/1.4817920" @default.
• W1968049559 hasPublicationYear "2013" @default.
• W1968049559 type Work @default.
• W1968049559 sameAs 1968049559 @default.
• W1968049559 citedByCount "45" @default.
• W1968049559 countsByYear W19680495592014 @default.
• W1968049559 countsByYear W19680495592015 @default.
• W1968049559 countsByYear W19680495592016 @default.
• W1968049559 countsByYear W19680495592017 @default.
• W1968049559 countsByYear W19680495592018 @default.
• W1968049559 countsByYear W19680495592019 @default.
• W1968049559 countsByYear W19680495592020 @default.
• W1968049559 countsByYear W19680495592021 @default.
• W1968049559 countsByYear W19680495592022 @default.
• W1968049559 countsByYear W19680495592023 @default.
• W1968049559 crossrefType "journal-article" @default.
• W1968049559 hasAuthorship W1968049559A5010518216 @default.
• W1968049559 hasAuthorship W1968049559A5030507867 @default.
• W1968049559 hasAuthorship W1968049559A5069885304 @default.
• W1968049559 hasAuthorship W1968049559A5075161205 @default.
• W1968049559 hasBestOaLocation W19680495592 @default.
• W1968049559 hasConcept C119599485 @default.
• W1968049559 hasConcept C121332964 @default.
• W1968049559 hasConcept C127413603 @default.
• W1968049559 hasConcept C147120987 @default.
• W1968049559 hasConcept C165801399 @default.
• W1968049559 hasConcept C17525397 @default.
• W1968049559 hasConcept C184779094 @default.
• W1968049559 hasConcept C188414643 @default.
• W1968049559 hasConcept C206755178 @default.
• W1968049559 hasConcept C27753989 @default.
• W1968049559 hasConcept C38976095 @default.
• W1968049559 hasConcept C60034648 @default.
• W1968049559 hasConcept C62520636 @default.
• W1968049559 hasConcept C68687820 @default.
• W1968049559 hasConcept C82706917 @default.
• W1968049559 hasConcept C88682704 @default.
• W1968049559 hasConcept C95974651 @default.
• W1968049559 hasConceptScore W1968049559C119599485 @default.
• W1968049559 hasConceptScore W1968049559C121332964 @default.
• W1968049559 hasConceptScore W1968049559C127413603 @default.
• W1968049559 hasConceptScore W1968049559C147120987 @default.
• W1968049559 hasConceptScore W1968049559C165801399 @default.
• W1968049559 hasConceptScore W1968049559C17525397 @default.
• W1968049559 hasConceptScore W1968049559C184779094 @default.
• W1968049559 hasConceptScore W1968049559C188414643 @default.
• W1968049559 hasConceptScore W1968049559C206755178 @default.
• W1968049559 hasConceptScore W1968049559C27753989 @default.
• W1968049559 hasConceptScore W1968049559C38976095 @default.
• W1968049559 hasConceptScore W1968049559C60034648 @default.
• W1968049559 hasConceptScore W1968049559C62520636 @default.
• W1968049559 hasConceptScore W1968049559C68687820 @default.
• W1968049559 hasConceptScore W1968049559C82706917 @default.
• W1968049559 hasConceptScore W1968049559C88682704 @default.
• W1968049559 hasConceptScore W1968049559C95974651 @default.
• W1968049559 hasIssue "6" @default.
• W1968049559 hasLocation W19680495591 @default.
• W1968049559 hasLocation W19680495592 @default.

• next