Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968059119> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1968059119 abstract "In this paper we present the analytical and experimental investigation of the air damping of micromachined scanning mirrors with out-of-plane comb drive actuation. A simple, compact model for the damping torque is derived by estimating the orders of magnitude of certain damping contributors. Viscous damping in comb finger gaps is estimated to be the dominant contributor. Because the comb fingers disengage as the scan amplitude increases, the damping coefficient is dependent on the amplitude of angular vibrations. Experimental measurements are presented for a variety of comb-finger geometries. The comb finger length, width, and the gap between comb fingers are varied, and the damping behaviour for single-axis scanning is characterised by measuring the decay rate of free oscillations. The damping is characterised by the exponential decay constant <i>δ</i>, found by fitting to the decaying oscillation amplitude. The predictions of the analytical model are compared to these experimental damping measurements." @default.
- W1968059119 created "2016-06-24" @default.
- W1968059119 creator A5018153720 @default.
- W1968059119 creator A5019858699 @default.
- W1968059119 creator A5027349839 @default.
- W1968059119 creator A5059001220 @default.
- W1968059119 creator A5090421868 @default.
- W1968059119 creator A5090959428 @default.
- W1968059119 date "2004-08-16" @default.
- W1968059119 modified "2023-09-30" @default.
- W1968059119 title "Damping analysis and measurement for a comb-drive scanning mirror" @default.
- W1968059119 doi "https://doi.org/10.1117/12.550529" @default.
- W1968059119 hasPublicationYear "2004" @default.
- W1968059119 type Work @default.
- W1968059119 sameAs 1968059119 @default.
- W1968059119 citedByCount "15" @default.
- W1968059119 countsByYear W19680591192012 @default.
- W1968059119 countsByYear W19680591192014 @default.
- W1968059119 countsByYear W19680591192015 @default.
- W1968059119 countsByYear W19680591192016 @default.
- W1968059119 countsByYear W19680591192017 @default.
- W1968059119 countsByYear W19680591192018 @default.
- W1968059119 countsByYear W19680591192019 @default.
- W1968059119 countsByYear W19680591192020 @default.
- W1968059119 countsByYear W19680591192021 @default.
- W1968059119 countsByYear W19680591192023 @default.
- W1968059119 crossrefType "proceedings-article" @default.
- W1968059119 hasAuthorship W1968059119A5018153720 @default.
- W1968059119 hasAuthorship W1968059119A5019858699 @default.
- W1968059119 hasAuthorship W1968059119A5027349839 @default.
- W1968059119 hasAuthorship W1968059119A5059001220 @default.
- W1968059119 hasAuthorship W1968059119A5090421868 @default.
- W1968059119 hasAuthorship W1968059119A5090959428 @default.
- W1968059119 hasConcept C120665830 @default.
- W1968059119 hasConcept C121332964 @default.
- W1968059119 hasConcept C138234222 @default.
- W1968059119 hasConcept C144171764 @default.
- W1968059119 hasConcept C180188523 @default.
- W1968059119 hasConcept C180205008 @default.
- W1968059119 hasConcept C185544564 @default.
- W1968059119 hasConcept C198394728 @default.
- W1968059119 hasConcept C24890656 @default.
- W1968059119 hasConcept C2778439541 @default.
- W1968059119 hasConcept C520434653 @default.
- W1968059119 hasConcept C54355233 @default.
- W1968059119 hasConcept C86803240 @default.
- W1968059119 hasConcept C97355855 @default.
- W1968059119 hasConceptScore W1968059119C120665830 @default.
- W1968059119 hasConceptScore W1968059119C121332964 @default.
- W1968059119 hasConceptScore W1968059119C138234222 @default.
- W1968059119 hasConceptScore W1968059119C144171764 @default.
- W1968059119 hasConceptScore W1968059119C180188523 @default.
- W1968059119 hasConceptScore W1968059119C180205008 @default.
- W1968059119 hasConceptScore W1968059119C185544564 @default.
- W1968059119 hasConceptScore W1968059119C198394728 @default.
- W1968059119 hasConceptScore W1968059119C24890656 @default.
- W1968059119 hasConceptScore W1968059119C2778439541 @default.
- W1968059119 hasConceptScore W1968059119C520434653 @default.
- W1968059119 hasConceptScore W1968059119C54355233 @default.
- W1968059119 hasConceptScore W1968059119C86803240 @default.
- W1968059119 hasConceptScore W1968059119C97355855 @default.
- W1968059119 hasLocation W19680591191 @default.
- W1968059119 hasOpenAccess W1968059119 @default.
- W1968059119 hasPrimaryLocation W19680591191 @default.
- W1968059119 hasRelatedWork W1575077847 @default.
- W1968059119 hasRelatedWork W1983290920 @default.
- W1968059119 hasRelatedWork W2001954398 @default.
- W1968059119 hasRelatedWork W2063428335 @default.
- W1968059119 hasRelatedWork W2065958818 @default.
- W1968059119 hasRelatedWork W2160293638 @default.
- W1968059119 hasRelatedWork W2947529791 @default.
- W1968059119 hasRelatedWork W3098287017 @default.
- W1968059119 hasRelatedWork W3103970705 @default.
- W1968059119 hasRelatedWork W4320490911 @default.
- W1968059119 isParatext "false" @default.
- W1968059119 isRetracted "false" @default.
- W1968059119 magId "1968059119" @default.
- W1968059119 workType "article" @default.