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- W1968091398 abstract "Application of photothermal vibration to a diaphragm manometer is described. The resonance frequency of the photothermal vibration was measured for a diaphragm to which a differential pressure was applied. Upon increasing pressure from 0.5 to 3×10 3 Pa, the resonance frequency increased monotonically by 3 kHz, the shift of which was independent of the gas species in the above vacuum region." @default.
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- W1968091398 date "1992-08-01" @default.
- W1968091398 modified "2023-10-10" @default.
- W1968091398 title "Application of Photothermal Vibration to a Diaphragm Manometer in a Medium-Vacuum Region" @default.
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- W1968091398 doi "https://doi.org/10.1143/jjap.31.2644" @default.
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