Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968124961> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W1968124961 endingPage "277" @default.
- W1968124961 startingPage "271" @default.
- W1968124961 abstract "A piezoelectrically actuated array of cantilever beams in lanthanum gallium silicate (langasite, La3Ga5SiO14) was designed and fabricated. Langasite is a new piezoelectric material with promising properties for micro-electromechanical applications at high temperatures. Shear strain actuation of the cantilevers was confirmed by vibrometer measurements. Impedance measurements have shown that the array is working at temperatures above 700 °C. Further, ultrasonic milling of langasite was investigated and a multi-step wet chemical etching process has been developed and was used to structure the langasite. During etching an anisotropic etching behavior has been observed. FEM simulations have been done to design the array as a component of a gravimetric sensor." @default.
- W1968124961 created "2016-06-24" @default.
- W1968124961 creator A5006692988 @default.
- W1968124961 creator A5009761984 @default.
- W1968124961 creator A5051188042 @default.
- W1968124961 creator A5051366981 @default.
- W1968124961 creator A5062501081 @default.
- W1968124961 creator A5071513664 @default.
- W1968124961 date "2006-11-01" @default.
- W1968124961 modified "2023-10-02" @default.
- W1968124961 title "Piezoelectric driven resonant beam array in langasite (La3Ga5SiO14)" @default.
- W1968124961 cites W2001512391 @default.
- W1968124961 cites W2013495045 @default.
- W1968124961 cites W2038645738 @default.
- W1968124961 cites W2062801723 @default.
- W1968124961 cites W2086052182 @default.
- W1968124961 cites W2089541233 @default.
- W1968124961 cites W2130504694 @default.
- W1968124961 cites W2152306973 @default.
- W1968124961 cites W2506361927 @default.
- W1968124961 cites W3120540138 @default.
- W1968124961 doi "https://doi.org/10.1016/j.sna.2006.04.013" @default.
- W1968124961 hasPublicationYear "2006" @default.
- W1968124961 type Work @default.
- W1968124961 sameAs 1968124961 @default.
- W1968124961 citedByCount "9" @default.
- W1968124961 countsByYear W19681249612012 @default.
- W1968124961 countsByYear W19681249612014 @default.
- W1968124961 countsByYear W19681249612022 @default.
- W1968124961 crossrefType "journal-article" @default.
- W1968124961 hasAuthorship W1968124961A5006692988 @default.
- W1968124961 hasAuthorship W1968124961A5009761984 @default.
- W1968124961 hasAuthorship W1968124961A5051188042 @default.
- W1968124961 hasAuthorship W1968124961A5051366981 @default.
- W1968124961 hasAuthorship W1968124961A5062501081 @default.
- W1968124961 hasAuthorship W1968124961A5071513664 @default.
- W1968124961 hasConcept C100082104 @default.
- W1968124961 hasConcept C100460472 @default.
- W1968124961 hasConcept C121332964 @default.
- W1968124961 hasConcept C141354745 @default.
- W1968124961 hasConcept C159985019 @default.
- W1968124961 hasConcept C192562407 @default.
- W1968124961 hasConcept C24890656 @default.
- W1968124961 hasConcept C2779055265 @default.
- W1968124961 hasConcept C2779227376 @default.
- W1968124961 hasConcept C33220542 @default.
- W1968124961 hasConcept C49040817 @default.
- W1968124961 hasConcept C57693265 @default.
- W1968124961 hasConcept C6260449 @default.
- W1968124961 hasConcept C927094 @default.
- W1968124961 hasConcept C96199931 @default.
- W1968124961 hasConceptScore W1968124961C100082104 @default.
- W1968124961 hasConceptScore W1968124961C100460472 @default.
- W1968124961 hasConceptScore W1968124961C121332964 @default.
- W1968124961 hasConceptScore W1968124961C141354745 @default.
- W1968124961 hasConceptScore W1968124961C159985019 @default.
- W1968124961 hasConceptScore W1968124961C192562407 @default.
- W1968124961 hasConceptScore W1968124961C24890656 @default.
- W1968124961 hasConceptScore W1968124961C2779055265 @default.
- W1968124961 hasConceptScore W1968124961C2779227376 @default.
- W1968124961 hasConceptScore W1968124961C33220542 @default.
- W1968124961 hasConceptScore W1968124961C49040817 @default.
- W1968124961 hasConceptScore W1968124961C57693265 @default.
- W1968124961 hasConceptScore W1968124961C6260449 @default.
- W1968124961 hasConceptScore W1968124961C927094 @default.
- W1968124961 hasConceptScore W1968124961C96199931 @default.
- W1968124961 hasIssue "1" @default.
- W1968124961 hasLocation W19681249611 @default.
- W1968124961 hasOpenAccess W1968124961 @default.
- W1968124961 hasPrimaryLocation W19681249611 @default.
- W1968124961 hasRelatedWork W1969633583 @default.
- W1968124961 hasRelatedWork W2002177491 @default.
- W1968124961 hasRelatedWork W2004286198 @default.
- W1968124961 hasRelatedWork W2209157952 @default.
- W1968124961 hasRelatedWork W2349516824 @default.
- W1968124961 hasRelatedWork W2387953855 @default.
- W1968124961 hasRelatedWork W2620788546 @default.
- W1968124961 hasRelatedWork W2981599551 @default.
- W1968124961 hasRelatedWork W2996491767 @default.
- W1968124961 hasRelatedWork W3034605311 @default.
- W1968124961 hasVolume "132" @default.
- W1968124961 isParatext "false" @default.
- W1968124961 isRetracted "false" @default.
- W1968124961 magId "1968124961" @default.
- W1968124961 workType "article" @default.