Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968202995> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W1968202995 endingPage "41" @default.
- W1968202995 startingPage "36" @default.
- W1968202995 abstract "Ni-salicided MOSFETs with a gate stack of ALD Al 2 O 3 /HfO 2 /Al 2 O 3 high-κ dielectric and poly-SiGe gate electrode were fabricated. The Si pMOSFETs with an EOT of 1.7 nm showed an expected gate leakage current reduction compared to SiO 2 with the same EOT and a mobility around 20% lower than the universal curve. The strained SiGe surface-channel pMOSFETs with the same gate stack showed an enhanced current drive and hole mobility. The Si nMOSFETs, however, exhibited a degraded subthreshold slope and a lower current drive even compared with the Si pMOSFETs. Possible reasons for the degradation of Si nMOSFETs were discussed." @default.
- W1968202995 created "2016-06-24" @default.
- W1968202995 creator A5006739024 @default.
- W1968202995 creator A5033275489 @default.
- W1968202995 creator A5055827441 @default.
- W1968202995 creator A5059858621 @default.
- W1968202995 creator A5065066084 @default.
- W1968202995 creator A5078596277 @default.
- W1968202995 creator A5081403316 @default.
- W1968202995 creator A5087219494 @default.
- W1968202995 date "2005-01-01" @default.
- W1968202995 modified "2023-10-18" @default.
- W1968202995 title "Ni-salicided CMOS with a poly-SiGe/Al2O3/HfO2/Al2O3 gate stack" @default.
- W1968202995 cites W1977227720 @default.
- W1968202995 cites W1991965248 @default.
- W1968202995 cites W2022292172 @default.
- W1968202995 cites W2105917526 @default.
- W1968202995 cites W2111745238 @default.
- W1968202995 cites W2120201770 @default.
- W1968202995 cites W2141435375 @default.
- W1968202995 cites W2148455098 @default.
- W1968202995 cites W2534432696 @default.
- W1968202995 doi "https://doi.org/10.1016/j.mee.2004.08.004" @default.
- W1968202995 hasPublicationYear "2005" @default.
- W1968202995 type Work @default.
- W1968202995 sameAs 1968202995 @default.
- W1968202995 citedByCount "3" @default.
- W1968202995 crossrefType "journal-article" @default.
- W1968202995 hasAuthorship W1968202995A5006739024 @default.
- W1968202995 hasAuthorship W1968202995A5033275489 @default.
- W1968202995 hasAuthorship W1968202995A5055827441 @default.
- W1968202995 hasAuthorship W1968202995A5059858621 @default.
- W1968202995 hasAuthorship W1968202995A5065066084 @default.
- W1968202995 hasAuthorship W1968202995A5078596277 @default.
- W1968202995 hasAuthorship W1968202995A5081403316 @default.
- W1968202995 hasAuthorship W1968202995A5087219494 @default.
- W1968202995 hasConcept C103566474 @default.
- W1968202995 hasConcept C106782819 @default.
- W1968202995 hasConcept C119599485 @default.
- W1968202995 hasConcept C127413603 @default.
- W1968202995 hasConcept C133386390 @default.
- W1968202995 hasConcept C156465305 @default.
- W1968202995 hasConcept C16317505 @default.
- W1968202995 hasConcept C165801399 @default.
- W1968202995 hasConcept C166972891 @default.
- W1968202995 hasConcept C172385210 @default.
- W1968202995 hasConcept C192562407 @default.
- W1968202995 hasConcept C199360897 @default.
- W1968202995 hasConcept C2361726 @default.
- W1968202995 hasConcept C24326235 @default.
- W1968202995 hasConcept C2778413303 @default.
- W1968202995 hasConcept C2779679103 @default.
- W1968202995 hasConcept C41008148 @default.
- W1968202995 hasConcept C46362747 @default.
- W1968202995 hasConcept C49040817 @default.
- W1968202995 hasConcept C51140833 @default.
- W1968202995 hasConcept C9395851 @default.
- W1968202995 hasConceptScore W1968202995C103566474 @default.
- W1968202995 hasConceptScore W1968202995C106782819 @default.
- W1968202995 hasConceptScore W1968202995C119599485 @default.
- W1968202995 hasConceptScore W1968202995C127413603 @default.
- W1968202995 hasConceptScore W1968202995C133386390 @default.
- W1968202995 hasConceptScore W1968202995C156465305 @default.
- W1968202995 hasConceptScore W1968202995C16317505 @default.
- W1968202995 hasConceptScore W1968202995C165801399 @default.
- W1968202995 hasConceptScore W1968202995C166972891 @default.
- W1968202995 hasConceptScore W1968202995C172385210 @default.
- W1968202995 hasConceptScore W1968202995C192562407 @default.
- W1968202995 hasConceptScore W1968202995C199360897 @default.
- W1968202995 hasConceptScore W1968202995C2361726 @default.
- W1968202995 hasConceptScore W1968202995C24326235 @default.
- W1968202995 hasConceptScore W1968202995C2778413303 @default.
- W1968202995 hasConceptScore W1968202995C2779679103 @default.
- W1968202995 hasConceptScore W1968202995C41008148 @default.
- W1968202995 hasConceptScore W1968202995C46362747 @default.
- W1968202995 hasConceptScore W1968202995C49040817 @default.
- W1968202995 hasConceptScore W1968202995C51140833 @default.
- W1968202995 hasConceptScore W1968202995C9395851 @default.
- W1968202995 hasIssue "1" @default.
- W1968202995 hasLocation W19682029951 @default.
- W1968202995 hasOpenAccess W1968202995 @default.
- W1968202995 hasPrimaryLocation W19682029951 @default.
- W1968202995 hasRelatedWork W1990458040 @default.
- W1968202995 hasRelatedWork W1998516141 @default.
- W1968202995 hasRelatedWork W2003772310 @default.
- W1968202995 hasRelatedWork W2114486237 @default.
- W1968202995 hasRelatedWork W2343457720 @default.
- W1968202995 hasRelatedWork W2539612973 @default.
- W1968202995 hasRelatedWork W3178812210 @default.
- W1968202995 hasRelatedWork W4229014659 @default.
- W1968202995 hasRelatedWork W2560113260 @default.
- W1968202995 hasRelatedWork W2755649773 @default.
- W1968202995 hasVolume "77" @default.
- W1968202995 isParatext "false" @default.
- W1968202995 isRetracted "false" @default.
- W1968202995 magId "1968202995" @default.
- W1968202995 workType "article" @default.