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- W1968274322 abstract "This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commercial SOI-MUMPS process. Additional masses were manually added to lower the resonant frequency." @default.
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- W1968274322 date "2012-03-01" @default.
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- W1968274322 title "A MEMS sensor for low-frequency vibration energy harvesting" @default.
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- W1968274322 doi "https://doi.org/10.1109/mamna.2012.6195098" @default.
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