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- W1968280080 abstract "In this article, we present a new method for the synthesis of amorphous nitrogenated carbon films using an alternate CH4 plasma deposition/subsequent N2 plasma treatment, so-called alternate plasma deposition (APD), in a dual electron cyclotron resonance (ECR)-rf plasma. The nitrogen to carbon ratio in the film surface deposited by this method, estimated by x-ray photoelectron spectroscopy (XPS), is considerably higher, by about a factor of 2, than that obtained in the film deposited from a conventional CH4/N2 plasma. From infrared spectroscopy it is shown that the APD film has the more enhanced disordered phase, which is accompanied by an increase of the amount of sp2 hybridized carbon-nitrogen bonds, as shown by XPS spectra." @default.
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- W1968280080 date "1999-01-01" @default.
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- W1968280080 title "Deposition of amorphous nitrogenated carbon films using an alternate plasma deposition method in a dual electron cyclotron resonance-radio frequency plasma" @default.
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- W1968280080 doi "https://doi.org/10.1116/1.581586" @default.
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