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• W1968288668 abstract "In this article, a technique for non-destructive stress analysis of thermal silicon-oxide (SiO x ) film using cathodoluminescence (CL) spectroscopy is described. The uniaxial tensile tester which can be used in a scanning electron microscope (SEM) chamber was developed to apply tensile stress to the film specimen. CL spectra of SiO x film were measured under various tensile stresses. The peak position linearly increased at 7.53×10−3 eV/GPa with an increase in tensile stress. The peak intensity and half bandwidth changed with an increase in electron beam (EB) irradiation time period. Using Raman spectroscope and transmission electron microscope (TEM), it was found that EB irradiation produced silicon nanocrystals in SiO x film. The nanocrystals as well as applied stress affected CL spectra." @default.
• W1968288668 created "2016-06-24" @default.
• W1968288668 creator A5003144736 @default.
• W1968288668 creator A5006620298 @default.
• W1968288668 creator A5012370360 @default.
• W1968288668 creator A5028841429 @default.
• W1968288668 creator A5032502465 @default.
• W1968288668 creator A5057416027 @default.
• W1968288668 creator A5060278875 @default.
• W1968288668 creator A5064260738 @default.
• W1968288668 creator A5075005440 @default.
• W1968288668 date "2012-01-01" @default.
• W1968288668 modified "2023-09-27" @default.
• W1968288668 title "Cathodoluminescence spectroscopy study for non-destructive stress analysis of thermal silicon-oxide film" @default.
• W1968288668 cites W1995539803 @default.
• W1968288668 cites W2040935941 @default.
• W1968288668 cites W2048253250 @default.
• W1968288668 cites W2085955437 @default.
• W1968288668 cites W2325422144 @default.
• W1968288668 doi "https://doi.org/10.1109/memsys.2012.6170165" @default.
• W1968288668 hasPublicationYear "2012" @default.
• W1968288668 type Work @default.
• W1968288668 sameAs 1968288668 @default.
• W1968288668 citedByCount "0" @default.
• W1968288668 crossrefType "proceedings-article" @default.
• W1968288668 hasAuthorship W1968288668A5003144736 @default.
• W1968288668 hasAuthorship W1968288668A5006620298 @default.
• W1968288668 hasAuthorship W1968288668A5012370360 @default.
• W1968288668 hasAuthorship W1968288668A5028841429 @default.
• W1968288668 hasAuthorship W1968288668A5032502465 @default.
• W1968288668 hasAuthorship W1968288668A5057416027 @default.
• W1968288668 hasAuthorship W1968288668A5060278875 @default.
• W1968288668 hasAuthorship W1968288668A5064260738 @default.
• W1968288668 hasAuthorship W1968288668A5075005440 @default.
• W1968288668 hasConcept C112950240 @default.
• W1968288668 hasConcept C113196181 @default.
• W1968288668 hasConcept C120665830 @default.
• W1968288668 hasConcept C121332964 @default.
• W1968288668 hasConcept C139861200 @default.
• W1968288668 hasConcept C146088050 @default.
• W1968288668 hasConcept C148869448 @default.
• W1968288668 hasConcept C159985019 @default.
• W1968288668 hasConcept C171250308 @default.
• W1968288668 hasConcept C185592680 @default.
• W1968288668 hasConcept C192562407 @default.
• W1968288668 hasConcept C26771246 @default.
• W1968288668 hasConcept C2777431650 @default.
• W1968288668 hasConcept C2779105228 @default.
• W1968288668 hasConcept C32891209 @default.
• W1968288668 hasConcept C40003534 @default.
• W1968288668 hasConcept C43617362 @default.
• W1968288668 hasConcept C49040817 @default.
• W1968288668 hasConcept C544956773 @default.
• W1968288668 hasConcept C62520636 @default.
• W1968288668 hasConceptScore W1968288668C112950240 @default.
• W1968288668 hasConceptScore W1968288668C113196181 @default.
• W1968288668 hasConceptScore W1968288668C120665830 @default.
• W1968288668 hasConceptScore W1968288668C121332964 @default.
• W1968288668 hasConceptScore W1968288668C139861200 @default.
• W1968288668 hasConceptScore W1968288668C146088050 @default.
• W1968288668 hasConceptScore W1968288668C148869448 @default.
• W1968288668 hasConceptScore W1968288668C159985019 @default.
• W1968288668 hasConceptScore W1968288668C171250308 @default.
• W1968288668 hasConceptScore W1968288668C185592680 @default.
• W1968288668 hasConceptScore W1968288668C192562407 @default.
• W1968288668 hasConceptScore W1968288668C26771246 @default.
• W1968288668 hasConceptScore W1968288668C2777431650 @default.
• W1968288668 hasConceptScore W1968288668C2779105228 @default.
• W1968288668 hasConceptScore W1968288668C32891209 @default.
• W1968288668 hasConceptScore W1968288668C40003534 @default.
• W1968288668 hasConceptScore W1968288668C43617362 @default.
• W1968288668 hasConceptScore W1968288668C49040817 @default.
• W1968288668 hasConceptScore W1968288668C544956773 @default.
• W1968288668 hasConceptScore W1968288668C62520636 @default.
• W1968288668 hasLocation W19682886681 @default.
• W1968288668 hasOpenAccess W1968288668 @default.
• W1968288668 hasPrimaryLocation W19682886681 @default.
• W1968288668 hasRelatedWork W144666417 @default.
• W1968288668 hasRelatedWork W1561893783 @default.
• W1968288668 hasRelatedWork W1565919013 @default.
• W1968288668 hasRelatedWork W1603608334 @default.
• W1968288668 hasRelatedWork W1617920754 @default.
• W1968288668 hasRelatedWork W1652444265 @default.
• W1968288668 hasRelatedWork W1964163104 @default.
• W1968288668 hasRelatedWork W1972592738 @default.
• W1968288668 hasRelatedWork W1981884481 @default.
• W1968288668 hasRelatedWork W2049420560 @default.
• W1968288668 hasRelatedWork W2087496264 @default.
• W1968288668 hasRelatedWork W2094104051 @default.
• W1968288668 hasRelatedWork W2136783282 @default.
• W1968288668 hasRelatedWork W2573640209 @default.
• W1968288668 hasRelatedWork W2794535258 @default.
• W1968288668 hasRelatedWork W2914611278 @default.
• W1968288668 hasRelatedWork W3036861722 @default.
• W1968288668 hasRelatedWork W3092396273 @default.
• W1968288668 hasRelatedWork W3134452145 @default.
• W1968288668 hasRelatedWork W3162843189 @default.
• W1968288668 isParatext "false" @default.
• W1968288668 isRetracted "false" @default.
• W1968288668 magId "1968288668" @default.

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