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- W1968594133 abstract "Rotational temperature has been used widely as neutral gas temperature measurement in different types of plasmas (electron cyclotron resonance, inductively coupled plasma, helicon, hollow cathode, etc.), and has been assumed to be in equilibrium with translational temperature. The direct experimental comparison of rotational and translational temperature in low-temperature plasmas has not been reported. In this research, optical emission spectroscopy is used to measure the neutral gas rotational temperature, Trot, from the second-positive band of a nitrogen molecule (380nm). The results are compared with the Doppler-broadened translational temperature, Ttrans, of Ar (750nm) and He (587nm), determined with a high-resolution spectrometer at various partial pressures of N2 in Ar∕N2 and He∕N2 plasmas. The results demonstrated that Trot and Ttrans are in equilibrium in the conditions [1010<ne(cm−3)<5×1012, 1<Te(eV)<5, 1<pfill(mTorr)<50] of our plasma experiment." @default.
- W1968594133 created "2016-06-24" @default.
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- W1968594133 date "2006-09-01" @default.
- W1968594133 modified "2023-09-26" @default.
- W1968594133 title "Rotational and translational temperature equilibrium in an inductively coupled plasma" @default.
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- W1968594133 doi "https://doi.org/10.1116/1.2244539" @default.
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