Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968659785> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1968659785 abstract "This paper examines the effects of specular and diffuse reflectivities, both empirically and theoretically, on the imaging process for highly reflective substrates. Aluminum (Al) and Titanium Nitride (TiN) wafers were used extensively in this study. TiN wafers were prepared with varying specular reflectivities and virtually no diffuse reflectivity. Dose to clear on TiN wafers was found to increase linearly with specular reflectivity in the absence of any diffuse component. Aluminum wafers were prepared with high specular reflectivity and varying diffuse reflectivities. On these Al wafers, the increase in diffuse reflectivity decreased the dose to clear in a nonlinear fashion. A theoretical explanation for the observed phenomenon is presented based on the interaction of thin film interference effects with diffuse scattering. Modelling results based on this theory are shown to be in good agreement with the experimentally observed data. Based on these results, a method for the generation of specification limits for the allowable variations in specular and diffuse reflectivities are also presented. Also discussed are the tools and methods used for measuring substrate reflectivity to obtain these specification limits." @default.
- W1968659785 created "2016-06-24" @default.
- W1968659785 creator A5000381998 @default.
- W1968659785 creator A5078217347 @default.
- W1968659785 creator A5080955390 @default.
- W1968659785 date "1993-08-04" @default.
- W1968659785 modified "2023-09-23" @default.
- W1968659785 title "Lithographic effects of metal reflectivity variations" @default.
- W1968659785 doi "https://doi.org/10.1117/12.148978" @default.
- W1968659785 hasPublicationYear "1993" @default.
- W1968659785 type Work @default.
- W1968659785 sameAs 1968659785 @default.
- W1968659785 citedByCount "2" @default.
- W1968659785 crossrefType "proceedings-article" @default.
- W1968659785 hasAuthorship W1968659785A5000381998 @default.
- W1968659785 hasAuthorship W1968659785A5078217347 @default.
- W1968659785 hasAuthorship W1968659785A5080955390 @default.
- W1968659785 hasConcept C108597893 @default.
- W1968659785 hasConcept C118381688 @default.
- W1968659785 hasConcept C120665830 @default.
- W1968659785 hasConcept C121332964 @default.
- W1968659785 hasConcept C151596937 @default.
- W1968659785 hasConcept C156328458 @default.
- W1968659785 hasConcept C159985019 @default.
- W1968659785 hasConcept C160671074 @default.
- W1968659785 hasConcept C161790260 @default.
- W1968659785 hasConcept C185592680 @default.
- W1968659785 hasConcept C191897082 @default.
- W1968659785 hasConcept C192562407 @default.
- W1968659785 hasConcept C194760766 @default.
- W1968659785 hasConcept C2778489163 @default.
- W1968659785 hasConcept C2779227376 @default.
- W1968659785 hasConcept C49040817 @default.
- W1968659785 hasConcept C513153333 @default.
- W1968659785 hasConcept C525849907 @default.
- W1968659785 hasConcept C55148256 @default.
- W1968659785 hasConcept C55493867 @default.
- W1968659785 hasConcept C65165184 @default.
- W1968659785 hasConcept C82261727 @default.
- W1968659785 hasConceptScore W1968659785C108597893 @default.
- W1968659785 hasConceptScore W1968659785C118381688 @default.
- W1968659785 hasConceptScore W1968659785C120665830 @default.
- W1968659785 hasConceptScore W1968659785C121332964 @default.
- W1968659785 hasConceptScore W1968659785C151596937 @default.
- W1968659785 hasConceptScore W1968659785C156328458 @default.
- W1968659785 hasConceptScore W1968659785C159985019 @default.
- W1968659785 hasConceptScore W1968659785C160671074 @default.
- W1968659785 hasConceptScore W1968659785C161790260 @default.
- W1968659785 hasConceptScore W1968659785C185592680 @default.
- W1968659785 hasConceptScore W1968659785C191897082 @default.
- W1968659785 hasConceptScore W1968659785C192562407 @default.
- W1968659785 hasConceptScore W1968659785C194760766 @default.
- W1968659785 hasConceptScore W1968659785C2778489163 @default.
- W1968659785 hasConceptScore W1968659785C2779227376 @default.
- W1968659785 hasConceptScore W1968659785C49040817 @default.
- W1968659785 hasConceptScore W1968659785C513153333 @default.
- W1968659785 hasConceptScore W1968659785C525849907 @default.
- W1968659785 hasConceptScore W1968659785C55148256 @default.
- W1968659785 hasConceptScore W1968659785C55493867 @default.
- W1968659785 hasConceptScore W1968659785C65165184 @default.
- W1968659785 hasConceptScore W1968659785C82261727 @default.
- W1968659785 hasLocation W19686597851 @default.
- W1968659785 hasOpenAccess W1968659785 @default.
- W1968659785 hasPrimaryLocation W19686597851 @default.
- W1968659785 hasRelatedWork W1598285965 @default.
- W1968659785 hasRelatedWork W181704760 @default.
- W1968659785 hasRelatedWork W1855457699 @default.
- W1968659785 hasRelatedWork W1968659785 @default.
- W1968659785 hasRelatedWork W1976172044 @default.
- W1968659785 hasRelatedWork W2129929649 @default.
- W1968659785 hasRelatedWork W2168881412 @default.
- W1968659785 hasRelatedWork W2234011658 @default.
- W1968659785 hasRelatedWork W2992226123 @default.
- W1968659785 hasRelatedWork W4321517081 @default.
- W1968659785 isParatext "false" @default.
- W1968659785 isRetracted "false" @default.
- W1968659785 magId "1968659785" @default.
- W1968659785 workType "article" @default.