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• W1968661814 abstract "Arrays of conical-like spikes can be formed on silicon surface after irradiated with femtosecond laser pulses in ambient of SF 6 or N 2 . In this article, we report our observations on how the shape of the spikes formed on silicon surface varies with the polarization of laser beam. The experimental results show that, with circular polarized laser irradiation, the shape of the spikes is conical; however, with linearly polarized laser irradiation, the spikes show elliptic conical shape, and the long-axes are perpendicular to the direction of the polarization of laser beam. The asymmetric shape of spikes produced by linearly polarized laser beam can be explained by considering the polarization dependence of Fresnel-refraction." @default.
• W1968661814 created "2016-06-24" @default.
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• W1968661814 date "2006-02-01" @default.
• W1968661814 modified "2023-09-26" @default.
• W1968661814 title "Effect of polarization on femtosecond laser pulses structuring silicon surface" @default.
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• W1968661814 doi "https://doi.org/10.1016/j.apsusc.2005.04.048" @default.
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