Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968754250> ?p ?o ?g. }
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- W1968754250 endingPage "474" @default.
- W1968754250 startingPage "465" @default.
- W1968754250 abstract "This paper reports our work on a series of alicyclic polymer-based photoresist platforms designed for 193nm lithography. The polymers described here were prepared from derivatives of norbornene and appropriate co-monomers by free radical polymerization. A variety of techniques were explored as a means of enhancing the lithographic, optical, dissolution, and mechanical properties of photoresists formulated from these alicyclic polymers. Recent studies designed to improve the lithographic performance of photoresists formulated with these materials are described. The process lattitude, delay stability and the utility of the resist for pattern transfer of lithographic images into polysilicon were also studied." @default.
- W1968754250 created "2016-06-24" @default.
- W1968754250 creator A5006237410 @default.
- W1968754250 creator A5027381116 @default.
- W1968754250 creator A5045628863 @default.
- W1968754250 creator A5052199939 @default.
- W1968754250 creator A5061638971 @default.
- W1968754250 date "1998-01-01" @default.
- W1968754250 modified "2023-10-04" @default.
- W1968754250 title "Recent Advancements In Cycloolefin Based Resists For ArF Lithography." @default.
- W1968754250 doi "https://doi.org/10.2494/photopolymer.11.465" @default.
- W1968754250 hasPublicationYear "1998" @default.
- W1968754250 type Work @default.
- W1968754250 sameAs 1968754250 @default.
- W1968754250 citedByCount "13" @default.
- W1968754250 crossrefType "journal-article" @default.
- W1968754250 hasAuthorship W1968754250A5006237410 @default.
- W1968754250 hasAuthorship W1968754250A5027381116 @default.
- W1968754250 hasAuthorship W1968754250A5045628863 @default.
- W1968754250 hasAuthorship W1968754250A5052199939 @default.
- W1968754250 hasAuthorship W1968754250A5061638971 @default.
- W1968754250 hasBestOaLocation W19687542501 @default.
- W1968754250 hasConcept C105487726 @default.
- W1968754250 hasConcept C134406635 @default.
- W1968754250 hasConcept C159985019 @default.
- W1968754250 hasConcept C171250308 @default.
- W1968754250 hasConcept C188027245 @default.
- W1968754250 hasConcept C192562407 @default.
- W1968754250 hasConcept C204223013 @default.
- W1968754250 hasConcept C206263279 @default.
- W1968754250 hasConcept C2779227376 @default.
- W1968754250 hasConcept C2780547246 @default.
- W1968754250 hasConcept C41794268 @default.
- W1968754250 hasConcept C44228677 @default.
- W1968754250 hasConcept C49040817 @default.
- W1968754250 hasConcept C521977710 @default.
- W1968754250 hasConcept C53524968 @default.
- W1968754250 hasConceptScore W1968754250C105487726 @default.
- W1968754250 hasConceptScore W1968754250C134406635 @default.
- W1968754250 hasConceptScore W1968754250C159985019 @default.
- W1968754250 hasConceptScore W1968754250C171250308 @default.
- W1968754250 hasConceptScore W1968754250C188027245 @default.
- W1968754250 hasConceptScore W1968754250C192562407 @default.
- W1968754250 hasConceptScore W1968754250C204223013 @default.
- W1968754250 hasConceptScore W1968754250C206263279 @default.
- W1968754250 hasConceptScore W1968754250C2779227376 @default.
- W1968754250 hasConceptScore W1968754250C2780547246 @default.
- W1968754250 hasConceptScore W1968754250C41794268 @default.
- W1968754250 hasConceptScore W1968754250C44228677 @default.
- W1968754250 hasConceptScore W1968754250C49040817 @default.
- W1968754250 hasConceptScore W1968754250C521977710 @default.
- W1968754250 hasConceptScore W1968754250C53524968 @default.
- W1968754250 hasIssue "3" @default.
- W1968754250 hasLocation W19687542501 @default.
- W1968754250 hasOpenAccess W1968754250 @default.
- W1968754250 hasPrimaryLocation W19687542501 @default.
- W1968754250 hasRelatedWork W1577782092 @default.
- W1968754250 hasRelatedWork W1968754250 @default.
- W1968754250 hasRelatedWork W1970843578 @default.
- W1968754250 hasRelatedWork W2058845851 @default.
- W1968754250 hasRelatedWork W2069602738 @default.
- W1968754250 hasRelatedWork W2076613628 @default.
- W1968754250 hasRelatedWork W2092347884 @default.
- W1968754250 hasRelatedWork W2095314224 @default.
- W1968754250 hasRelatedWork W2376266960 @default.
- W1968754250 hasRelatedWork W2488412051 @default.
- W1968754250 hasVolume "11" @default.
- W1968754250 isParatext "false" @default.
- W1968754250 isRetracted "false" @default.
- W1968754250 magId "1968754250" @default.
- W1968754250 workType "article" @default.